Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11518082 | Low temperature atmospheric pressure plasma for cleaning and activating metals | Thomas Scott Williams, Toby Desmond Oste, Sarkis Keshishian, Robert F. Hicks | 2022-12-06 |
| 11136665 | Shadow ring for modifying wafer edge and bevel deposition | Dale Du Bois, Mohamad A. Ayoub, Robert W. Kim, Amit Kumar BANSAL, Mark Fodor +6 more | 2021-10-05 |
| 10800092 | Low temperature atmospheric pressure plasma for cleaning and activating metals | Thomas Scott Williams, Toby Desmond Oste, Sarkis Keshishian, Robert F. Hicks | 2020-10-13 |
| 10227695 | Shadow ring for modifying wafer edge and bevel deposition | Dale R. Du Bois, Mohamad A. Ayoub, Robert W. Kim, Amit Kumar BANSAL, Mark Fodor +6 more | 2019-03-12 |
| 10118315 | Preparing tool surfaces for composites | Mikhail Grigoriev, Robert F. Hicks | 2018-11-06 |
| 10032609 | Low temperature atmospheric pressure plasma applications | Thomas Scott Williams, Toby Desmond Oste, Sarkis Keshishian, Robert F. Hicks | 2018-07-24 |
| 9406485 | Argon and helium plasma apparatus and methods | Thomas Scott Williams, Toby Desmond Oste, Sarkis Keshishian, Robert F. Hicks | 2016-08-02 |
| 8569105 | Passivating glue layer to improve amorphous carbon to metal adhesion | Deenesh Padhi | 2013-10-29 |
| 8349741 | Amorphous carbon deposition method for improved stack defectivity | Hang Yu, Deenesh Padhi, Man-Ping Cai, Naomi Yoshida, Li Yan Miao +4 more | 2013-01-08 |
| 8278139 | Passivating glue layer to improve amorphous carbon to metal adhesion | Deenesh Padhi | 2012-10-02 |
| 8227352 | Amorphous carbon deposition method for improved stack defectivity | Hang Yu, Deenesh Padhi, Man-Ping Cai, Naomi Yoshida, Li Yan Miao +4 more | 2012-07-24 |
| 8097082 | Nonplanar faceplate for a plasma processing chamber | Jianhua Zhou, Deenesh Padhi, Karthik Janakiraman, Hang Yu, Yoganand Saripalli +1 more | 2012-01-17 |