Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300554 | Systems and methods for analyzing defects in CVD films | Man-Ping Cai, Wenhui Li, Michael Wenyoung Tsiang, Praket P. Jha, Jingmin Leng | 2025-05-13 |
| 11699623 | Systems and methods for analyzing defects in CVD films | Man-Ping Cai, Wenhui Li, Michael Wenyoung Tsiang, Praket P. Jha, Jingmin Leng | 2023-07-11 |
| 10566206 | Systems and methods for anisotropic material breakthrough | Nitin K. Ingle | 2020-02-18 |
| 10490406 | Systems and methods for material breakthrough | Mang-Mang Ling, Tom Choi, Nitin K. Ingle | 2019-11-26 |
| 10373822 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more | 2019-08-06 |
| 10354889 | Non-halogen etching of silicon-containing materials | Tom Choi, Mang-Mang Ling, Nitin K. Ingle | 2019-07-16 |
| 10074534 | Ultra-conformal carbon film deposition | Swayambhu Prasad Behera, Shahid Shaikh, Pramit Manna, Tersem Summan, Patrick Reilly +4 more | 2018-09-11 |
| 9837265 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more | 2017-12-05 |
| 9721784 | Ultra-conformal carbon film deposition | Swayambhu Prasad Behera, Shahid Shaikh, Pramit Manna, Tersem Summan, Patrick Reilly +4 more | 2017-08-01 |
| 9659769 | Tensile dielectric films using UV curing | Bhadri N. Varadarajan, Sean Chang, James S. Sims, Guangquan Lu, David Mordo +2 more | 2017-05-23 |
| 9478434 | Chlorine-based hardmask removal | Xikun Wang, Zhenjiang Cui, Mikhail Korolik, Anchuan Wang, Nitin K. Ingle +1 more | 2016-10-25 |
| 9390910 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more | 2016-07-12 |
| 9373522 | Titanium nitride removal | Xikun Wang, Anchuan Wang, Nitin K. Ingle | 2016-06-21 |
| 9355862 | Fluorine-based hardmask removal | Xikun Wang, Zhenjiang Cui, Mikhail Korolik, Anchuan Wang, Nitin K. Ingle | 2016-05-31 |
| 9355820 | Methods for removing carbon containing films | Wei Liu, Naomi Yoshida | 2016-05-31 |
| 9343272 | Self-aligned process | Anchuan Wang, Nitin K. Ingle | 2016-05-17 |
| 9337314 | Technique for selectively processing three dimensional device | Nilay A. Pradhan, Benjamin Colombeau, Naushad K. Variam, Christopher Dennis Bencher, Adam Brand | 2016-05-10 |