| 12300554 |
Systems and methods for analyzing defects in CVD films |
Man-Ping Cai, Wenhui Li, Michael Wenyoung Tsiang, Praket P. Jha, Jingmin Leng |
2025-05-13 |
| 11699623 |
Systems and methods for analyzing defects in CVD films |
Man-Ping Cai, Wenhui Li, Michael Wenyoung Tsiang, Praket P. Jha, Jingmin Leng |
2023-07-11 |
| 10566206 |
Systems and methods for anisotropic material breakthrough |
Nitin K. Ingle |
2020-02-18 |
| 10490406 |
Systems and methods for material breakthrough |
Mang-Mang Ling, Tom Choi, Nitin K. Ingle |
2019-11-26 |
| 10373822 |
Gas flow profile modulated control of overlay in plasma CVD films |
Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more |
2019-08-06 |
| 10354889 |
Non-halogen etching of silicon-containing materials |
Tom Choi, Mang-Mang Ling, Nitin K. Ingle |
2019-07-16 |
| 10074534 |
Ultra-conformal carbon film deposition |
Swayambhu Prasad Behera, Shahid Shaikh, Pramit Manna, Tersem Summan, Patrick Reilly +4 more |
2018-09-11 |
| 9837265 |
Gas flow profile modulated control of overlay in plasma CVD films |
Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more |
2017-12-05 |
| 9721784 |
Ultra-conformal carbon film deposition |
Swayambhu Prasad Behera, Shahid Shaikh, Pramit Manna, Tersem Summan, Patrick Reilly +4 more |
2017-08-01 |
| 9659769 |
Tensile dielectric films using UV curing |
Bhadri N. Varadarajan, Sean Chang, James S. Sims, Guangquan Lu, David Mordo +2 more |
2017-05-23 |
| 9478434 |
Chlorine-based hardmask removal |
Xikun Wang, Zhenjiang Cui, Mikhail Korolik, Anchuan Wang, Nitin K. Ingle +1 more |
2016-10-25 |
| 9390910 |
Gas flow profile modulated control of overlay in plasma CVD films |
Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more |
2016-07-12 |
| 9373522 |
Titanium nitride removal |
Xikun Wang, Anchuan Wang, Nitin K. Ingle |
2016-06-21 |
| 9355862 |
Fluorine-based hardmask removal |
Xikun Wang, Zhenjiang Cui, Mikhail Korolik, Anchuan Wang, Nitin K. Ingle |
2016-05-31 |
| 9355820 |
Methods for removing carbon containing films |
Wei Liu, Naomi Yoshida |
2016-05-31 |
| 9343272 |
Self-aligned process |
Anchuan Wang, Nitin K. Ingle |
2016-05-17 |
| 9337314 |
Technique for selectively processing three dimensional device |
Nilay A. Pradhan, Benjamin Colombeau, Naushad K. Variam, Christopher Dennis Bencher, Adam Brand |
2016-05-10 |
