Issued Patents All Time
Showing 1–25 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368075 | Graphene integration | Ieva Narkeviciute, Kashish Sharma | 2025-07-22 |
| 12359311 | Conformal deposition of silicon carbide films using heterogeneous precursor interaction | Matthew Scott Weimer, Bo Gong, Zhe Gui | 2025-07-15 |
| 12331402 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Patrick Breiling, Bo Gong, Will Schlosser +3 more | 2025-06-17 |
| 12334332 | Remote plasma based deposition of silicon carbide films using silicon-containing and carbon-containing precursors | Matthew Scott Weimer, Galbokka Hewage Layan Savithra, Bo Gong, Zhe Gui | 2025-06-17 |
| 12300488 | Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill | Guangbi Yuan, Ieva Narkeviciute, Bo Gong | 2025-05-13 |
| 12272547 | Conformal deposition of silicon carbide films | Bo Gong, Zhe Gui | 2025-04-08 |
| 12000047 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Patrick Breiling, Bo Gong, Will Schlosser +3 more | 2024-06-04 |
| 11920239 | Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma | Bo Gong, Rachel E. Batzer, Huatan Qiu, Bart J. van Schravendijk, Geoffrey Hohn | 2024-03-05 |
| 11894227 | Conformal deposition of silicon carbide films | Bo Gong, Zhe Gui | 2024-02-06 |
| 11848199 | Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill | Guangbi Yuan, Ieva Narkeviciute, Bo Gong | 2023-12-19 |
| 11761079 | Oxidation resistant protective layer in chamber conditioning | Fengyuan Lai, Bo Gong, Guangbi Yuan, Chen-Hua Hsu | 2023-09-19 |
| 11732350 | Films of desired composition and film properties | — | 2023-08-22 |
| 11708634 | Films of desired composition and film properties | — | 2023-07-25 |
| 11680315 | Films of desired composition and film properties | — | 2023-06-20 |
| 11680314 | Films of desired composition and film properties | — | 2023-06-20 |
| 11608559 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Patrick Breiling, Bo Gong, Will Schlosser +3 more | 2023-03-21 |
| 11264234 | Conformal deposition of silicon carbide films | Bo Gong, Zhe Gui | 2022-03-01 |
| 11209729 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Richard A. Gottscho, Dennis M. Hausmann, Adrien LaVoie +3 more | 2021-12-28 |
| 11101164 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Patrick Breiling, Bo Gong, Will Schlosser +3 more | 2021-08-24 |
| 11011379 | Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors | Reza Arghavani, Samantha Tan, Adrien LaVoie, Ananda Banerji, Jun Qian +1 more | 2021-05-18 |
| 10840087 | Remote plasma based deposition of boron nitride, boron carbide, and boron carbonitride films | Matthew Scott Weimer | 2020-11-17 |
| 10832904 | Remote plasma based deposition of oxygen doped silicon carbide films | — | 2020-11-10 |
| 10831096 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Richard A. Gottscho, Dennis M. Hausmann, Adrien LaVoie +3 more | 2020-11-10 |
| 10763107 | Methods of encapsulation | Bart J. van Schravendijk, Akhil Singhal, Joseph Hung-chi Wei, Kevin McLaughlin, Casey Holder +1 more | 2020-09-01 |
| 10604841 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Patrick Breiling, Bo Gong, Will Schlosser +3 more | 2020-03-31 |