Issued Patents All Time
Showing 26–50 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10580690 | Staircase encapsulation in 3D NAND fabrication | Yongsik Yu, Bart J. van Schravendijk, Nagraj Shankar | 2020-03-03 |
| 10566186 | Methods of encapsulation | Bart J. van Schravendijk, Akhil Singhal, Joseph Hung-chi Wei, Kevin McLaughlin, Casey Holder +1 more | 2020-02-18 |
| 10559468 | Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors | Reza Arghavani, Samantha Tan, Adrien LaVoie, Ananda Banerji, Jun Qian +1 more | 2020-02-11 |
| 10514598 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Richard A. Gottscho, Dennis M. Hausmann, Adrien LaVoie +3 more | 2019-12-24 |
| 10472714 | Method to obtain SiC class of films of desired composition and film properties | — | 2019-11-12 |
| 10325773 | Conformal deposition of silicon carbide films | Bo Gong, Zhe Gui | 2019-06-18 |
| 10319582 | Methods and apparatus for depositing silicon oxide on metal layers | Zhe Gui, Bo Gong, Andrew John McKerrow | 2019-06-11 |
| 10297442 | Remote plasma based deposition of graded or multi-layered silicon carbide film | Bo Gong, Guangbi Yuan, Zhe Gui, Fengyuan Lai | 2019-05-21 |
| 10211310 | Remote plasma based deposition of SiOC class of films | — | 2019-02-19 |
| 10157736 | Methods of encapsulation | Bart J. van Schravendijk, Akhil Singhal, Joseph Hung-chi Wei, Kevin McLaughlin, Casey Holder +1 more | 2018-12-18 |
| 10037905 | UV and reducing treatment for K recovery and surface clean in semiconductor processing | George Andrew Antonelli, Bart J. van Schravendijk | 2018-07-31 |
| 10002787 | Staircase encapsulation in 3D NAND fabrication | Yongsik Yu, Bart J. van Schravendijk, Nagraj Shankar | 2018-06-19 |
| 9997357 | Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors | Reza Arghavani, Samantha Tan, Adrien LaVoie, Ananda Banerji, Jun Qian +1 more | 2018-06-12 |
| 9837270 | Densification of silicon carbide film using remote plasma treatment | Bo Gong, Guangbi Yuan, Zhe Gui, Fengyuan Lai | 2017-12-05 |
| 9828672 | Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma | Bo Gong, Rachel E. Batzer, Huatan Qiu, Bart J. van Schravendijk, Geoffrey Hohn | 2017-11-28 |
| 9778561 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Richard A. Gottscho, Dennis M. Hausmann, Adrien LaVoie +3 more | 2017-10-03 |
| 9659769 | Tensile dielectric films using UV curing | Sean Chang, James S. Sims, Guangquan Lu, David Mordo, Kevin J. Ilcisin +2 more | 2017-05-23 |
| 9601693 | Method for encapsulating a chalcogenide material | Jon Henri, Dennis M. Hausmann, Seshasayee Varadarajan | 2017-03-21 |
| 9418889 | Selective formation of dielectric barriers for metal interconnects in semiconductor devices | Thomas W. Mountsier, Hui-Jung Wu, Nagraj Shankar, William T. Lee | 2016-08-16 |
| 9371579 | Ground state hydrogen radical sources for chemical vapor deposition of silicon-carbon-containing films | Bo Gong | 2016-06-21 |
| 9234276 | Method to obtain SiC class of films of desired composition and film properties | — | 2016-01-12 |
| 9147589 | Systems and methods for at least partially converting films to silicon oxide and/or improving film quality using ultraviolet curing in steam and densification of films using UV curing in ammonia | Bart J. van Schravendijk | 2015-09-29 |
| 9050623 | Progressive UV cure | — | 2015-06-09 |
| 8647993 | Methods for UV-assisted conformal film deposition | Adrien LaVoie, Jon Henri, Dennis M. Hausmann | 2014-02-11 |
| 8528224 | Systems and methods for at least partially converting films to silicon oxide and/or improving film quality using ultraviolet curing in steam and densification of films using UV curing in ammonia | Bart J. van Schravendijk | 2013-09-10 |