Issued Patents All Time
Showing 1–25 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9337072 | Apparatus and method for substrate clamping in a plasma chamber | Ganesh Balasubramanian, Amit Kumar BANSAL, Eller Y. Juco, Mohamad A. Ayoub, Hyung Joon Kim +11 more | 2016-05-10 |
| 8902428 | Process and apparatus for measuring the crystal fraction of crystalline silicon casted mono wafers | Asaf Schlezinger | 2014-12-02 |
| 8900405 | Plasma immersion ion implantation reactor with extended cathode process ring | Peter I. Porshnev, Majeed A. Foad, Kartik Ramaswamy, Biagio Gallo, Hiroji Hanawa +2 more | 2014-12-02 |
| 8895842 | High quality TCO-silicon interface contact structure for high efficiency thin film silicon solar cells | Shuran Sheng, Yong Kee Chae, Stefan Klein, Bhaskar Kumar | 2014-11-25 |
| 8796769 | Thermal flux annealing influence of buried species | Dean Jennings | 2014-08-05 |
| 8501568 | Method of forming flash memory with ultraviolet treatment | Mihaela Balseanu, Vladimir Zubkov, Li-Qun Xia, Atif Noori, Reza Arghavani +1 more | 2013-08-06 |
| 8445075 | Method to minimize wet etch undercuts and provide pore sealing of extreme low k (k<2.5) dielectrics | Huiwen Xu, Mei-Yee Shek, Li-Qun Xia, Derek R. Witty, Hichem M'Saad | 2013-05-21 |
| 8288239 | Thermal flux annealing influence of buried species | Dean Jennings | 2012-10-16 |
| 8252653 | Method of forming a non-volatile memory having a silicon nitride charge trap layer | Mihaela Balseanu, Vladimir Zubkov, Li-Qun Xia, Atif Noori, Reza Arghavani +1 more | 2012-08-28 |
| 8197636 | Systems for plasma enhanced chemical vapor deposition and bevel edge etching | Ashish Shah, Dale R. DuBois, Ganesh Balasubramanian, Mark Fodor, Eui Kyoon Kim +7 more | 2012-06-12 |
| 8058156 | Plasma immersion ion implantation reactor having multiple ion shower grids | Hiroji Hanawa, Tsutomu Tanaka, Kenneth S. Collins, Kartik Ramaswamy, Andrew Nguyen | 2011-11-15 |
| 7879683 | Methods and apparatus of creating airgap in dielectric layers for the reduction of RC delay | Alexandros T. Demos, Kang Sub Yim, Mehul Naik, Zhenjiang Cui, Mihaela Balseanu +2 more | 2011-02-01 |
| 7816205 | Method of forming non-volatile memory having charge trap layer with compositional gradient | Mihaela Balseanu, Vladimir Zubkov, Li-Qun Xia, Atif Noori, Reza Arghavani +1 more | 2010-10-19 |
| 7777197 | Vacuum reaction chamber with x-lamp heater | Lester D'Cruz, Alexandros T. Demos, Dale R. DuBois, Khaled A. Elsheref, Naoyuki Iwasaki +4 more | 2010-08-17 |
| 7767561 | Plasma immersion ion implantation reactor having an ion shower grid | Hiroji Hanawa, Tsutomu Tanaka, Kenneth S. Collins, Kartik Ramaswamy, Andrew Nguyen | 2010-08-03 |
| 7700465 | Plasma immersion ion implantation process using a plasma source having low dissociation and low minimum plasma voltage | Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Andrew Nguyen, Biagio Gallo +1 more | 2010-04-20 |
| 7695590 | Chemical vapor deposition plasma reactor having plural ion shower grids | Hiroji Hanawa, Tsutomu Tanaka, Kenneth S. Collins, Kartik Ramaswamy, Andrew Nguyen | 2010-04-13 |
| 7666464 | RF measurement feedback control and diagnostics for a plasma immersion ion implantation reactor | Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Andrew Nguyen, Biagio Gallo | 2010-02-23 |
| 7642180 | Semiconductor on insulator vertical transistor fabrication and doping process | Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Biagio Gallo, Andrew Nguyen | 2010-01-05 |
| 7566655 | Integration process for fabricating stressed transistor structure | Mihaela Balseanu, Jia-Sheng Lee, Mei-Yee Shek, Li-Qun Xia, Hichem M'Saad | 2009-07-28 |
| 7482255 | Method of ion implantation to reduce transient enhanced diffusion | Houda Graoui, Majeed A. Foad | 2009-01-27 |
| 7479456 | Gasless high voltage high contact force wafer contact-cooling electrostatic chuck | Douglas A. Buchberger, Jr., Daniel J. Hoffman, Kartik Ramaswamy, Andrew Nguyen, Hiorji Hanawa +1 more | 2009-01-20 |
| 7465478 | Plasma immersion ion implantation process | Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Andrew Nguyen, Biagio Gallo | 2008-12-16 |
| 7428915 | O-ringless tandem throttle valve for a plasma reactor chamber | Andrew Nguyen, Hiroji Hanawa, Kenneth S. Collins, Kartik Ramaswamy, Biagio Gallo | 2008-09-30 |
| 7429532 | Semiconductor substrate process using an optically writable carbon-containing mask | Kartik Ramaswamy, Hiroji Hanawa, Biagio Gallo, Kenneth S. Collins, Kai Ma +4 more | 2008-09-30 |