Issued Patents All Time
Showing 25 most recent of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9356188 | Tensile separation of a semiconducting stack | Ajit Paranjpe, Craig Metzner | 2016-05-31 |
| 8753989 | Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cure | Mihaela Balseanu, Michael S. Cox, Li-Qun Xia, Mei-Yee Shek, Vladimir Zubkov +4 more | 2014-06-17 |
| 8129290 | Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cure | Mihaela Balseanu, Michael S. Cox, Li-Qun Xia, Mei-Yee Shek, Vladimir Zubkov +4 more | 2012-03-06 |
| 7566655 | Integration process for fabricating stressed transistor structure | Mihaela Balseanu, Mei-Yee Shek, Amir Al-Bayati, Li-Qun Xia, Hichem M'Saad | 2009-07-28 |
| 7117064 | Method of depositing dielectric films | Srinivas D. Nemani, Li-Qun Xia, Dian Sugiarto, Ellie Yieh, Ping Xu +1 more | 2006-10-03 |
| 7026580 | Adjustable exhaust flow for thermal uniformity | Yao-Hwan Kao, De-Yuan Lu, Ming-Fa Chen | 2006-04-11 |
| 7001850 | Method of depositing dielectric films | Srinivas D. Nemani, Li-Qun Xia, Dian Sugiarto, Ellie Yieh, Ping Xu +1 more | 2006-02-21 |
| 6777171 | Fluorine-containing layers for damascene structures | Ping Xu, Ishing Lou, Li-Qun Xia | 2004-08-17 |
| 6764958 | Method of depositing dielectric films | Srinivas D. Nemani, Li-Qun Xia, Dian Sugiarto, Ellie Yieh, Ping Xu +1 more | 2004-07-20 |
| 6524925 | Method of forming a thin-film resistor in a semiconductor wafer | — | 2003-02-25 |
| 6489882 | Thin-film resistor | — | 2002-12-03 |
| 6316325 | Method for fabricating a thin film resistor | — | 2001-11-13 |
| 6272736 | Method for forming a thin-film resistor | — | 2001-08-14 |
| 6228735 | Method of fabricating thin-film transistor | — | 2001-05-08 |
| 6225183 | Method of fabricating a thin-film resistor having stable resistance | — | 2001-05-01 |
| 6207560 | Method for manufacturing thin-film resistor | — | 2001-03-27 |
| 6207521 | Thin-film resistor employed in a semiconductor wafer and its method formation | — | 2001-03-27 |
| 6156618 | Method for fabricating thin film resistor | — | 2000-12-05 |
| 6124615 | Stacked semiconductor structure for high integration of an integrated circuit with junction devices | — | 2000-09-26 |
| 6121667 | Photo diode | — | 2000-09-19 |
| 6117789 | Method of manufacturing thin film resistor layer | — | 2000-09-12 |
| 6110764 | Method of manufacturing an assembly with different types of high-voltage metal-oxide-semiconductor devices | — | 2000-08-29 |
| 6103589 | High-voltage device substrate structure and method of fabrication | — | 2000-08-15 |
| 6071763 | Method of fabricating layered integrated circuit | — | 2000-06-06 |
| 6037229 | High-voltage device substrate structure and method of fabrication | — | 2000-03-14 |