Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7479456 | Gasless high voltage high contact force wafer contact-cooling electrostatic chuck | Douglas A. Buchberger, Jr., Daniel J. Hoffman, Kartik Ramaswamy, Andrew Nguyen, Kenneth S. Collins +1 more | 2009-01-20 |