Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8753989 | Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cure | Mihaela Balseanu, Michael S. Cox, Li-Qun Xia, Mei-Yee Shek, Jia-Sheng Lee +4 more | 2014-06-17 |
| 8337950 | Method for depositing boron-rich films for lithographic mask applications | Victor Nguyen, Yi-Hsing Chen, Mihaela Balseanu, Li-Qun Xia, Derek R. Witty | 2012-12-25 |
| 8148269 | Boron nitride and boron-nitride derived materials deposition method | Mihaela Balseanu, Christopher Dennis Bencher, Yongmei Chen, Li Yan Miao, Victor Nguyen +2 more | 2012-04-03 |
| 8138104 | Method to increase silicon nitride tensile stress using nitrogen plasma in-situ treatment and ex-situ UV cure | Mihaela Balseanu, Victor Nguyen, Li-Qun Xia, Derek R. Witty, Hichem M'Saad +1 more | 2012-03-20 |
| 8129290 | Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cure | Mihaela Balseanu, Michael S. Cox, Li-Qun Xia, Mei-Yee Shek, Jia-Sheng Lee +4 more | 2012-03-06 |