Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183558 | Workpiece processing apparatus with thermal processing systems | Dixit V. Desai, Alex Wansidler, Dieter Hezler, Rolf Bremensdorfer, Pete Lembesis +1 more | 2024-12-31 |
| 12174616 | Control system for adaptive control of a thermal processing system | Michael X. Yang, Markus Lieberer | 2024-12-24 |
| 12120780 | Nitrogen injection for arc lamps | Rolf Bremensdorfer, Dave Camm, Pete Lembesis | 2024-10-15 |
| 12119216 | Arc lamp with forming gas for thermal processing systems | Michael X. Yang, Rolf Bremensdorfer, Dave Camm, Dieter Hezler, Shawming Ma +1 more | 2024-10-15 |
| 11837447 | Workpiece processing apparatus with plasma and thermal processing systems | Dixit V. Desai, Alex Wansidler, Dieter Hezler, Rolf Bremensdorfer, Pete Lembesis +1 more | 2023-12-05 |
| 11810802 | Substrate support in a millisecond anneal system | — | 2023-11-07 |
| 11721539 | Arc lamp with forming gas for thermal processing systems | Michael X. Yang, Rolf Bremensdorfer, Dave Camm, Dieter Hezler, Shawming Ma +1 more | 2023-08-08 |
| 11644817 | Control system for adaptive control of a thermal processing system | Michael X. Yang, Markus Lieberer | 2023-05-09 |
| 11255606 | Gas flow control for millisecond anneal system | Christian Pfahler | 2022-02-22 |
| 10966286 | Nitrogen injection for ARC lamps | Rolf Bremensdorfer, Dave Camm, Pete Lembesis | 2021-03-30 |
| 10734262 | Substrate support in a millisecond anneal system | — | 2020-08-04 |
| 10388552 | Substrate breakage detection in a thermal processing system | — | 2019-08-20 |
| 10242894 | Substrate breakage detection in a thermal processing system | — | 2019-03-26 |
| 9941144 | Substrate breakage detection in a thermal processing system | — | 2018-04-10 |
| 9627244 | Methods and systems for supporting a workpiece and for heat-treating the workpiece | David Malcolm Camm, Guillaume Sempere, Ljubomir Kaludjercic, Gregory Stuart, Mladen Bumbulovic +4 more | 2017-04-18 |
| 9279727 | Methods, apparatus and media for determining a shape of an irradiance pulse to which a workpiece is to be exposed | David Malcolm Camm | 2016-03-08 |
| 9070590 | Workpiece breakage prevention method and apparatus | David Malcolm Camm, Greg Stuart, Steve McCoy | 2015-06-30 |
| 8454356 | Systems and methods for supporting a workpiece during heat-treating | David Malcolm Camm, Mladen Bumbulovic | 2013-06-04 |
| 8434341 | Methods and systems for supporting a workpiece and for heat-treating the workpiece | David Malcolm Camm, Guillaume Sempere, Ljubomir Kaludjercic, Gregory Stuart, Mladen Bumbulovic +4 more | 2013-05-07 |
| 7501607 | Apparatuses and methods for suppressing thermally-induced motion of a workpiece | David Malcolm Camm, Mladen Bumbulovic, J. Elliott, Steve McCoy, Greg Stuart | 2009-03-10 |
| 5007646 | Golf putting practice device | James A. Baber | 1991-04-16 |