| 12183558 |
Workpiece processing apparatus with thermal processing systems |
Dixit V. Desai, Alex Wansidler, Dieter Hezler, Rolf Bremensdorfer, Pete Lembesis +1 more |
2024-12-31 |
| 12174616 |
Control system for adaptive control of a thermal processing system |
Michael X. Yang, Markus Lieberer |
2024-12-24 |
| 12120780 |
Nitrogen injection for arc lamps |
Rolf Bremensdorfer, Dave Camm, Pete Lembesis |
2024-10-15 |
| 12119216 |
Arc lamp with forming gas for thermal processing systems |
Michael X. Yang, Rolf Bremensdorfer, Dave Camm, Dieter Hezler, Shawming Ma +1 more |
2024-10-15 |
| 11837447 |
Workpiece processing apparatus with plasma and thermal processing systems |
Dixit V. Desai, Alex Wansidler, Dieter Hezler, Rolf Bremensdorfer, Pete Lembesis +1 more |
2023-12-05 |
| 11810802 |
Substrate support in a millisecond anneal system |
— |
2023-11-07 |
| 11721539 |
Arc lamp with forming gas for thermal processing systems |
Michael X. Yang, Rolf Bremensdorfer, Dave Camm, Dieter Hezler, Shawming Ma +1 more |
2023-08-08 |
| 11644817 |
Control system for adaptive control of a thermal processing system |
Michael X. Yang, Markus Lieberer |
2023-05-09 |
| 11255606 |
Gas flow control for millisecond anneal system |
Christian Pfahler |
2022-02-22 |
| 10966286 |
Nitrogen injection for ARC lamps |
Rolf Bremensdorfer, Dave Camm, Pete Lembesis |
2021-03-30 |
| 10734262 |
Substrate support in a millisecond anneal system |
— |
2020-08-04 |
| 10388552 |
Substrate breakage detection in a thermal processing system |
— |
2019-08-20 |
| 10242894 |
Substrate breakage detection in a thermal processing system |
— |
2019-03-26 |
| 9941144 |
Substrate breakage detection in a thermal processing system |
— |
2018-04-10 |
| 9627244 |
Methods and systems for supporting a workpiece and for heat-treating the workpiece |
David Malcolm Camm, Guillaume Sempere, Ljubomir Kaludjercic, Gregory Stuart, Mladen Bumbulovic +4 more |
2017-04-18 |
| 9279727 |
Methods, apparatus and media for determining a shape of an irradiance pulse to which a workpiece is to be exposed |
David Malcolm Camm |
2016-03-08 |
| 9070590 |
Workpiece breakage prevention method and apparatus |
David Malcolm Camm, Greg Stuart, Steve McCoy |
2015-06-30 |
| 8454356 |
Systems and methods for supporting a workpiece during heat-treating |
David Malcolm Camm, Mladen Bumbulovic |
2013-06-04 |
| 8434341 |
Methods and systems for supporting a workpiece and for heat-treating the workpiece |
David Malcolm Camm, Guillaume Sempere, Ljubomir Kaludjercic, Gregory Stuart, Mladen Bumbulovic +4 more |
2013-05-07 |
| 7501607 |
Apparatuses and methods for suppressing thermally-induced motion of a workpiece |
David Malcolm Camm, Mladen Bumbulovic, J. Elliott, Steve McCoy, Greg Stuart |
2009-03-10 |
| 5007646 |
Golf putting practice device |
James A. Baber |
1991-04-16 |