Workpiece processing apparatus with plasma and thermal processing systems

Assignee

• Beijing E-Town Semiconductor Technology Co.
• Mattson Technology

Inventors

• Dixit V. Desai (9 patents)
• Alex Wansidler (4 patents)
• Dieter Hezler (13 patents)
• Joseph Cibere (21 patents)
• Rolf Bremensdorfer (22 patents)
• Pete Lembesis (4 patents)
• Michael X. Yang (61 patents)

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