Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9493306 | Low cost high throughput processing platform | — | 2016-11-15 |
| 8668422 | Low cost high throughput processing platform | David A. Barker, Daniel J. Devine, Michael Kuhlman, Ryan Pakulski, Hongqing Shan +1 more | 2014-03-11 |
| 7658586 | Advanced low cost high throughput processing platform | David A. Barker, Michael Kuhlman, Ryan Pakulski, Hongqing Shan, Martin L. Zucker | 2010-02-09 |
| 7563068 | Low cost high throughput processing platform | David A. Barker, Daniel J. Devine, Michael Kuhlman, Ryan Pakulski, Hongqing Shan +1 more | 2009-07-21 |
| 6647665 | Door systems for low contamination, high throughput handling of workpieces for vacuum processing | Farzad Tabrizi, Barry Kitazumi, David A. Barker, David Setton, Michael Kuhlman | 2003-11-18 |
| 6568552 | Systems and methods for low contamination, high throughput handling of workpieces for vacuum processing | Farzad Tabrizi, Barry Kitazumi, David A. Barker, David Setton, Michael Kuhlman | 2003-05-27 |
| 6315512 | Systems and methods for robotic transfer of workpieces between a storage area and a processing chamber | Farzad Tabrizi, Barry Kitazumi, David A. Barker, David Setton, Michael Kuhlman | 2001-11-13 |
| 5452521 | Workpiece alignment structure and method | — | 1995-09-26 |