Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901161 | Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes | Tae Seung Cho, Saravana Kumar Natarajan, Kenneth D. Schatz, Dmitry Lubomirsky | 2024-02-13 |
| 11373845 | Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes | Tae Seung Cho, Saravana Kumar Natarajan, Kenneth D. Schatz, Dmitry Lubomirsky | 2022-06-28 |