Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901156 | Multi-charged-particle-beam writing apparatus and multi-charged-particle-beam writing method | Ryosuke Ueba, Satoru Hirose, Rieko Nishimura | 2024-02-13 |
| 10586682 | Method of obtaining beam deflection shape and method of obtaining arrangement angle of blanking aperture array plate | Rieko Nishimura | 2020-03-10 |