Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901195 | Methods, systems, and apparatus for conducting a radical treatment operation prior to conducting an annealing operation | Pradeep SAMPATH KUMAR, Norman L. Tam, Dongming Iu, Shashank Sharma, Eric Rieske | 2024-02-13 |
| 10763141 | Non-contact temperature calibration tool for a substrate support and method of using the same | Niraj Merchant, Lara Hawrylchak, Mehran Behdjat, Dietrich Gage, Christopher Dao +2 more | 2020-09-01 |