Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176242 | Rotatable thermal processing chamber | Wolfgang Aderhold | 2024-12-24 |
| 11978646 | Thermal chamber with improved thermal uniformity | Kartik Shah, Norman L. Tam, Matthew Spuller, Jau-Jiun CHEN, Kong CHAN +4 more | 2024-05-07 |
| 11901195 | Methods, systems, and apparatus for conducting a radical treatment operation prior to conducting an annealing operation | Pradeep SAMPATH KUMAR, Norman L. Tam, Shashank Sharma, Eric Rieske, Michael P. KAMP | 2024-02-13 |
| 11817297 | System and method for managing substrate outgassing | Matthew Spuller | 2023-11-14 |
| 11694919 | Vacuum chuck pressure control system | Mehran Behdjat | 2023-07-04 |
| 11664250 | Methods and apparatus for measuring edge ring temperature | Ji-Dih HU, Wolfgang Aderhold | 2023-05-30 |
| 11562915 | Methods, systems, and apparatus for optically monitoring individual lamps | Ji-Dih HU, Chaitanya A. PRASAD, Samuel C. Howells, Vilen K. NESTOROV | 2023-01-24 |
| 11348769 | Plasma-enhanced anneal chamber for wafer outgassing | Lara Hawrylchak, Matthew D. Scotney-Castle, Norman L. Tam, Matthew Spuller, Kong CHAN +1 more | 2022-05-31 |
| 11342209 | Methods and apparatus for measuring edge ring temperature | Ji-Dih HU, Wolfgang Aderhold | 2022-05-24 |
| 10948353 | Thermal processing chamber with low temperature control | Lara Hawrylchak, Samuel C. Howells, Wolfgang Aderhold, Leonid M. Tertitski, Michael S. Liu +2 more | 2021-03-16 |
| 10770272 | Plasma-enhanced anneal chamber for wafer outgassing | Lara Hawrylchak, Matthew D. Scotney-Castle, Norman L. Tam, Matthew Spuller, Kong CHAN | 2020-09-08 |
| 10741428 | Semiconductor processing chamber | Aaron Muir Hunter, Mehran Behdjat, Niraj Merchant, Douglas R. McAllister, Kong CHAN +1 more | 2020-08-11 |
| D877784 | Plasma outlet liner | Yanjun Xia, Kartik Shah | 2020-03-10 |
| 10571337 | Thermal cooling member with low temperature control | Lara Hawrylchak, Samuel C. Howells, Wolfgang Aderhold, Leonid M. Tertitski, Michael S. Liu +2 more | 2020-02-25 |
| 10405375 | Lamphead PCB with flexible standoffs | Joseph M. Ranish, Oleg V. Serebryanov | 2019-09-03 |
| 10202707 | Substrate processing system with lamphead having temperature management | Joseph M. Ranish, Paul Brillhart, Satheesh Kuppurao | 2019-02-12 |
| 10026630 | Retention and insulation features for lamp | Joseph M. Ranish, Oleg V. Serebryanov | 2018-07-17 |
| D807481 | Patterned heater pedestal | Mehran Behdjat | 2018-01-09 |
| 9768043 | Quartz upper and lower domes | Anzhong Chang, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir +9 more | 2017-09-19 |
| D796562 | Plasma outlet liner | — | 2017-09-05 |