| 12176242 |
Rotatable thermal processing chamber |
Wolfgang Aderhold |
2024-12-24 |
$95,614,000 |
| 11978646 |
Thermal chamber with improved thermal uniformity |
Kartik Shah, Norman L. Tam, Matthew Spuller, Jau-Jiun CHEN, Kong CHAN +4 more |
2024-05-07 |
$105,661,000 |
| 11901195 |
Methods, systems, and apparatus for conducting a radical treatment operation prior to conducting an annealing operation |
Pradeep SAMPATH KUMAR, Norman L. Tam, Shashank Sharma, Eric Rieske, Michael P. KAMP |
2024-02-13 |
$47,589,000 |
| 11817297 |
System and method for managing substrate outgassing |
Matthew Spuller |
2023-11-14 |
$33,075,000 |
| 11694919 |
Vacuum chuck pressure control system |
Mehran Behdjat |
2023-07-04 |
|
| 11664250 |
Methods and apparatus for measuring edge ring temperature |
Ji-Dih HU, Wolfgang Aderhold |
2023-05-30 |
$32,229,000 |
| 11562915 |
Methods, systems, and apparatus for optically monitoring individual lamps |
Ji-Dih HU, Chaitanya A. PRASAD, Samuel C. Howells, Vilen K. NESTOROV |
2023-01-24 |
$45,726,000 |
| 11348769 |
Plasma-enhanced anneal chamber for wafer outgassing |
Lara Hawrylchak, Matthew D. Scotney-Castle, Norman L. Tam, Matthew Spuller, Kong CHAN +1 more |
2022-05-31 |
$62,587,000 |
| 11342209 |
Methods and apparatus for measuring edge ring temperature |
Ji-Dih HU, Wolfgang Aderhold |
2022-05-24 |
$75,273,000 |
| 10948353 |
Thermal processing chamber with low temperature control |
Lara Hawrylchak, Samuel C. Howells, Wolfgang Aderhold, Leonid M. Tertitski, Michael S. Liu +2 more |
2021-03-16 |
$56,717,000 |
| 10770272 |
Plasma-enhanced anneal chamber for wafer outgassing |
Lara Hawrylchak, Matthew D. Scotney-Castle, Norman L. Tam, Matthew Spuller, Kong CHAN |
2020-09-08 |
$22,964,000 |
| 10741428 |
Semiconductor processing chamber |
Aaron Muir Hunter, Mehran Behdjat, Niraj Merchant, Douglas R. McAllister, Kong CHAN +1 more |
2020-08-11 |
$71,596,000 |
| D877784 |
Plasma outlet liner |
Yanjun Xia, Kartik Shah |
2020-03-10 |
|
| 10571337 |
Thermal cooling member with low temperature control |
Lara Hawrylchak, Samuel C. Howells, Wolfgang Aderhold, Leonid M. Tertitski, Michael S. Liu +2 more |
2020-02-25 |
$22,337,000 |
| 10405375 |
Lamphead PCB with flexible standoffs |
Joseph M. Ranish, Oleg V. Serebryanov |
2019-09-03 |
$20,988,000 |
| 10202707 |
Substrate processing system with lamphead having temperature management |
Joseph M. Ranish, Paul Brillhart, Satheesh Kuppurao |
2019-02-12 |
$37,465,000 |
| 10026630 |
Retention and insulation features for lamp |
Joseph M. Ranish, Oleg V. Serebryanov |
2018-07-17 |
$37,247,000 |
| D807481 |
Patterned heater pedestal |
Mehran Behdjat |
2018-01-09 |
|
| 9768043 |
Quartz upper and lower domes |
Anzhong Chang, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir +9 more |
2017-09-19 |
$15,798,000 |
| D796562 |
Plasma outlet liner |
— |
2017-09-05 |
|
