Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10458040 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack +5 more | 2019-10-29 |
| 10312096 | Methods for titanium silicide formation using TiCl4 precursor and silicon-containing precursor | Hua Chung, Matthias Bauer, Schubert S. Chu | 2019-06-04 |
| 10306708 | Absorbing reflector for semiconductor processing chamber | Kin Pong Lo, Paul Brillhart, Balasubramanian Ramachandran, Daniel Redfield, Joseph M. Ranish +6 more | 2019-05-28 |
| 10224421 | Self-aligned process for sub-10nm fin formation | Zhiyuan Ye, Xinyu BAO, Chun Yan, Hua Chung, Schubert S. Chu | 2019-03-05 |
| 10202707 | Substrate processing system with lamphead having temperature management | Joseph M. Ranish, Paul Brillhart, Dongming Iu | 2019-02-12 |
| 10119192 | EPI base ring | Steve Aboagye, Paul Brillhart, Surajit Kumar, Anzhong Chang, Mehmet Tugrul Samir +1 more | 2018-11-06 |
| 10077508 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2018-09-18 |
| 9870919 | Process chamber having separate process gas and purge gas regions | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2018-01-16 |
| 9845550 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack +5 more | 2017-12-19 |
| 9842753 | Absorbing lamphead face | Paul Brillhart, Joseph M. Ranish, Balasubramanian Ramachandran, Zuoming ZHU | 2017-12-12 |
| 9832816 | Absorbing reflector for semiconductor processing chamber | Kin Pong Lo, Paul Brillhart, Balasubramanian Ramachandran, Daniel Redfield, Joseph M. Ranish +6 more | 2017-11-28 |
| 9768043 | Quartz upper and lower domes | Anzhong Chang, Paul Brillhart, Surajit Kumar, Mehmet Tugrul Samir, David K. Carlson +9 more | 2017-09-19 |
| 9580835 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2017-02-28 |
| 9512520 | Semiconductor substrate processing system | Errol Antonio C. Sanchez, David K. Carlson | 2016-12-06 |
| 9322097 | EPI base ring | Steve Aboagye, Paul Brillhart, Surajit Kumar, Anzhong Chang, Mehmet Tugrul Samir +1 more | 2016-04-26 |
| 9230837 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2016-01-05 |
| 9058988 | Methods for depositing layers having reduced interfacial contamination | Jean R. Vatus, Jinsong Tang, Yihwan Kim, Errol Antonio C. Sanchez | 2015-06-16 |
| 8991332 | Apparatus to control semiconductor film deposition characteristics | David K. Carlson, Manish Hemkar, Andrew Lam, Errol Antonio C. Sanchez, Howard Beckford | 2015-03-31 |
| 8813538 | Methods and apparatus for insitu analysis of gases in electronic device fabrication systems | David K. Carlson | 2014-08-26 |
| 8772055 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2014-07-08 |
| 8728944 | Method of removing contaminants and native oxides from a substrate surface | Manish Hemkar, Vinh N. TRAN, Yihwan Kim | 2014-05-20 |
| 8663390 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | David K. Carlson, Howard Beckford, Herman Diniz, Kailash Kiran Patalay, Brian H. Burrows +4 more | 2014-03-04 |
| 8313804 | Apparatus and methods for chemical vapor deposition | David K. Carlson, Errol Antonio C. Sanchez | 2012-11-20 |
| 8020427 | Methods and apparatus for insitu analysis of gases in electronic device fabrication systems | David K. Carlson | 2011-09-20 |
| 7976634 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | David K. Carlson, Howard Beckford, Herman Diniz, Kailash Kiran Patalay, Brian H. Burrows +4 more | 2011-07-12 |