Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7967911 | Apparatus and methods for chemical vapor deposition | David K. Carlson, Errol Antonio C. Sanchez | 2011-06-28 |
| 7955646 | Elimination of flow and pressure gradients in low utilization processes | James P. Cruse, Andreas Hegedus | 2011-06-07 |
| 7770431 | Methods and apparatus for insitu analysis of gases in electronic device fabrication systems | David K. Carlson | 2010-08-10 |
| 7718225 | Method to control semiconductor film deposition characteristics | David K. Carlson, Manish Hemkar, Andrew Lam, Errol Antonio C. Sanchez, Howard Beckford | 2010-05-18 |
| 7709391 | Methods for in-situ generation of reactive etch and growth specie in film formation processes | David K. Carlson, Howard Beckford, Errol Antonio C. Sanchez | 2010-05-04 |
| 7560352 | Selective deposition | David K. Carlson, Errol Antonio C. Sanchez, Howard Beckford, Yihwan Kim | 2009-07-14 |
| 7494545 | Epitaxial deposition process and apparatus | Andrew Lam, Yihwan Kim, See-Eng Phan, Xinliang Lu, Chien-Teh Kao | 2009-02-24 |
| 7396743 | Low temperature epitaxial growth of silicon-containing films using UV radiation | Kaushal K. Singh, David K. Carlson, Manish Hemkar, Randhir P. S. Thakur | 2008-07-08 |
| 7262116 | Low temperature epitaxial growth of silicon-containing films using close proximity UV radiation | Kaushal K. Singh, David K. Carlson, Manish Hemkar, Randhir P. S. Thakur | 2007-08-28 |
| 6410456 | Method and apparatus for insitu vapor generation | Christian M. Gronet, Peter A. Knoot, Gary E. Miner, Guangcai Xing, David R. Lopes | 2002-06-25 |
| 6280790 | Reducing the deposition rate of volatile contaminants onto an optical component of a substrate processing system | Anthony F. White, Brian Haas | 2001-08-28 |
| 6159866 | Method for insitu vapor generation for forming an oxide on a substrate | Christian M. Gronet, Peter A. Knoot, Gary E. Miner, Guangcai Xing, David R. Lopes | 2000-12-12 |
| 6037273 | Method and apparatus for insitu vapor generation | Christian M. Gronet, Peter A. Knoot, Gary E. Miner, Guangcai Xing, David R. Lopes | 2000-03-14 |