Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12037701 | Multi-thermal CVD chambers with shared gas delivery and exhaust system | Zhiyuan Ye, Shu-Kwan LAU, Brian H. Burrows, Lori D. Washington, Herman Diniz +4 more | 2024-07-16 |
| 10269614 | Susceptor design to reduce edge thermal peak | Schubert S. Chu, Kartik Shah, Anhthu Ngo, Karthik Ramanathan, Nitin Pathak +8 more | 2019-04-23 |
| 8991332 | Apparatus to control semiconductor film deposition characteristics | Satheesh Kuppurao, David K. Carlson, Andrew Lam, Errol Antonio C. Sanchez, Howard Beckford | 2015-03-31 |
| 8728944 | Method of removing contaminants and native oxides from a substrate surface | Satheesh Kuppurao, Vinh N. TRAN, Yihwan Kim | 2014-05-20 |
| 7718225 | Method to control semiconductor film deposition characteristics | Satheesh Kuppurao, David K. Carlson, Andrew Lam, Errol Antonio C. Sanchez, Howard Beckford | 2010-05-18 |
| 7396743 | Low temperature epitaxial growth of silicon-containing films using UV radiation | Kaushal K. Singh, David K. Carlson, Satheesh Kuppurao, Randhir P. S. Thakur | 2008-07-08 |
| 7262116 | Low temperature epitaxial growth of silicon-containing films using close proximity UV radiation | Kaushal K. Singh, David K. Carlson, Satheesh Kuppurao, Randhir P. S. Thakur | 2007-08-28 |