Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7658973 | Tailoring nitrogen profile in silicon oxynitride using rapid thermal annealing with ammonia under ultra-low pressure | Pravin K. Narwankar, Arnaud Lepert | 2010-02-09 |
| 7611976 | Gate electrode dopant activation method for semiconductor manufacturing | Yi Ma, Khaled Ahmed, Kevin Cunningham, Robert C. McIntosh, Abhilash J. Mayur +6 more | 2009-11-03 |
| 7541650 | Gate electrode structures | Steven C. H. Hung | 2009-06-02 |
| 7317229 | Gate electrode structures and methods of manufacture | Steven C. H. Hung | 2008-01-08 |
| 7078302 | Gate electrode dopant activation method for semiconductor manufacturing including a laser anneal | Yi Ma, Khaled Ahmed, Kevin Cunningham, Robert C. McIntosh, Abhilash J. Mayur +6 more | 2006-07-18 |
| 6450116 | Apparatus for exposing a substrate to plasma radicals | David B. Noble, Ravi Jallepally, Nathan D'Astici, Turgut Sahin, Guangcai Xing +1 more | 2002-09-17 |
| 6410456 | Method and apparatus for insitu vapor generation | Christian M. Gronet, Peter A. Knoot, Guangcai Xing, David R. Lopes, Satheesh Kuppurao | 2002-06-25 |
| 6179466 | Method and apparatus for measuring substrate temperatures | Bruce W. Peuse, Mark Yam, Aaron Muir Hunter, Peter A. Knoot, Jason Mershon | 2001-01-30 |
| 6159866 | Method for insitu vapor generation for forming an oxide on a substrate | Christian M. Gronet, Peter A. Knoot, Guangcai Xing, David R. Lopes, Satheesh Kuppurao | 2000-12-12 |
| 6114258 | Method of oxidizing a substrate in the presence of nitride and oxynitride films | Guangcai Xing, David R. Lopes, Sathees Kuppurao | 2000-09-05 |
| 6037273 | Method and apparatus for insitu vapor generation | Christian M. Gronet, Peter A. Knoot, Guangcai Xing, David R. Lopes, Satheesh Kuppurao | 2000-03-14 |
| 5848842 | Method of calibrating a temperature measurement system | Bruce W. Peuse, Mark Yam | 1998-12-15 |
| 5755511 | Method and apparatus for measuring substrate temperatures | Bruce W. Peuse, Mark Yam | 1998-05-26 |
| 5660472 | Method and apparatus for measuring substrate temperatures | Bruce W. Peuse, Mark Yam | 1997-08-26 |
| 4963500 | Method of monitoring semiconductor manufacturing processes and test sample therefor | George W. Cogan, Lee A. Christel, James F. Gibbons | 1990-10-16 |