Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12313173 | Enhanced low noise, low leakage relief valve | Gerard G. Betz, II, David Walter Zuk | 2025-05-27 |
| 6280183 | Substrate support for a thermal processing chamber | Abhilash J. Mayur, Lewis Stern | 2001-08-28 |
| 6280790 | Reducing the deposition rate of volatile contaminants onto an optical component of a substrate processing system | Satheesh Kuppurao, Brian Haas | 2001-08-28 |
| 6231716 | Processing chamber with rapid wafer exchange | Eugene Smargiassi | 2001-05-15 |