| 8068234 |
Method and apparatus for measuring shape or thickness information of a substrate |
Shouhong Tang, George Kren, Dieter Mueller, Daniel Kavaldjiev |
2011-11-29 |
| 7436505 |
Computer-implemented methods and systems for determining a configuration for a light scattering inspection system |
Alexander Belyaev, Daniel Kavaldjiev, Amith Murali, Aleksey Petrenko, Mike Kirk +2 more |
2008-10-14 |
| 7127367 |
Tailored temperature uniformity |
Balasubramanian Ramachandran, Joseph M. Ranish, Ravi Jallepally, Sundar Ramamurthy, Raman Achutharaman +1 more |
2006-10-24 |
| 7041931 |
Stepped reflector plate |
Dean Jennings, Joseph M. Ranish, Ajit Balakrishna, Sundar Ramamurthy, Aaron Muir Hunter +1 more |
2006-05-09 |
| 6803546 |
Thermally processing a substrate |
Ryan Boas, Ajit Balakrishna, Benjamin Bierman, Dean Jennings, Wolfgang Aderhold +2 more |
2004-10-12 |
| 6280790 |
Reducing the deposition rate of volatile contaminants onto an optical component of a substrate processing system |
Anthony F. White, Satheesh Kuppurao |
2001-08-28 |
| 6215106 |
Thermally processing a substrate |
Ryan Boas, Ajit Balakrishna, Benjamin Bierman, Dean Jennings, Wolfgang Aderhold |
2001-04-10 |
| 6133152 |
Co-rotating edge ring extension for use in a semiconductor processing chamber |
Benjamin Bierman, Meredith J. Williams, David S. Ballance, Paul Deaton, James V. Tietz |
2000-10-17 |
| 6123766 |
Method and apparatus for achieving temperature uniformity of a substrate |
Meredith J. Williams, David S. Ballance, Benjamin Bierman, Paul Deaton, Nobuyuki Takahashi +1 more |
2000-09-26 |
| 6035100 |
Reflector cover for a semiconductor processing chamber |
Benjamin Bierman, David S. Ballance, James V. Tietz, Meredith J. Williams, Paul Deaton |
2000-03-07 |
| 5960555 |
Method and apparatus for purging the back side of a substrate during chemical vapor processing |
Paul Deaton, Benjamin Bierman, Meredith J. Williams, David S. Ballance, James V. Tietz |
1999-10-05 |
| 5920797 |
Method for gaseous substrate support |
David S. Ballance, Benjamin Bierman, James V. Tietz |
1999-07-06 |
