Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068234 | Method and apparatus for measuring shape or thickness information of a substrate | Shouhong Tang, George Kren, Dieter Mueller, Daniel Kavaldjiev | 2011-11-29 |
| 7436505 | Computer-implemented methods and systems for determining a configuration for a light scattering inspection system | Alexander Belyaev, Daniel Kavaldjiev, Amith Murali, Aleksey Petrenko, Mike Kirk +2 more | 2008-10-14 |
| 7127367 | Tailored temperature uniformity | Balasubramanian Ramachandran, Joseph M. Ranish, Ravi Jallepally, Sundar Ramamurthy, Raman Achutharaman +1 more | 2006-10-24 |
| 7041931 | Stepped reflector plate | Dean Jennings, Joseph M. Ranish, Ajit Balakrishna, Sundar Ramamurthy, Aaron Muir Hunter +1 more | 2006-05-09 |
| 6803546 | Thermally processing a substrate | Ryan Boas, Ajit Balakrishna, Benjamin Bierman, Dean Jennings, Wolfgang Aderhold +2 more | 2004-10-12 |
| 6280790 | Reducing the deposition rate of volatile contaminants onto an optical component of a substrate processing system | Anthony F. White, Satheesh Kuppurao | 2001-08-28 |
| 6215106 | Thermally processing a substrate | Ryan Boas, Ajit Balakrishna, Benjamin Bierman, Dean Jennings, Wolfgang Aderhold | 2001-04-10 |
| 6133152 | Co-rotating edge ring extension for use in a semiconductor processing chamber | Benjamin Bierman, Meredith J. Williams, David S. Ballance, Paul Deaton, James V. Tietz | 2000-10-17 |
| 6123766 | Method and apparatus for achieving temperature uniformity of a substrate | Meredith J. Williams, David S. Ballance, Benjamin Bierman, Paul Deaton, Nobuyuki Takahashi +1 more | 2000-09-26 |
| 6035100 | Reflector cover for a semiconductor processing chamber | Benjamin Bierman, David S. Ballance, James V. Tietz, Meredith J. Williams, Paul Deaton | 2000-03-07 |
| 5960555 | Method and apparatus for purging the back side of a substrate during chemical vapor processing | Paul Deaton, Benjamin Bierman, Meredith J. Williams, David S. Ballance, James V. Tietz | 1999-10-05 |
| 5920797 | Method for gaseous substrate support | David S. Ballance, Benjamin Bierman, James V. Tietz | 1999-07-06 |