Thermally processing a substrate

Assignee

• Applied Materials

Inventors

• Ryan Boas (5 patents)
• Ajit Balakrishna (39 patents)
• Benjamin Bierman (14 patents)
• Brian Haas (12 patents)
• Dean Jennings (74 patents)
• Wolfgang Aderhold (53 patents)
• Sundar Ramamurthy (28 patents)
• Abhilash J. Mayur (81 patents)

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