Method and apparatus for achieving temperature uniformity of a substrate

Assignee

• Applied Materials

Inventors

• Meredith J. Williams (6 patents)
• David S. Ballance (22 patents)
• Benjamin Bierman (14 patents)
• Paul Deaton (15 patents)
• Brian Haas (12 patents)
• Nobuyuki Takahashi (212 patents)
• James V. Tietz (26 patents)

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