Polishing head system and polishing apparatus

Assignee

• Ebara

Inventors

• Itsuki Kobata (41 patents)
• Hozumi Yasuda (83 patents)
• Akio Yanai (1 patents)
• Nobuyuki Takahashi (212 patents)
• Takamasa Nakamura (24 patents)
• Keisuke Sakata (3 patents)
• Nobuyuki Takada (30 patents)
• Yuji Yagi (28 patents)
• Yasuhiro Takada (29 patents)
• Katsuhide Watanabe (49 patents)

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