Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12017323 | Polishing head system and polishing apparatus | Itsuki Kobata, Hozumi Yasuda, Akio Yanai, Nobuyuki Takahashi, Takamasa Nakamura +4 more | 2024-06-25 |
| 11034519 | Article placement apparatus, stocker provided therewith, and transport vehicle system | Jun Sai, Kenji Ota | 2021-06-15 |
| 9399276 | Polishing apparatus | — | 2016-07-26 |