| 6133152 |
Co-rotating edge ring extension for use in a semiconductor processing chamber |
Benjamin Bierman, David S. Ballance, Brian Haas, Paul Deaton, James V. Tietz |
2000-10-17 |
| 6123766 |
Method and apparatus for achieving temperature uniformity of a substrate |
David S. Ballance, Benjamin Bierman, Paul Deaton, Brian Haas, Nobuyuki Takahashi +1 more |
2000-09-26 |
| 6048403 |
Multi-ledge substrate support for a thermal processing chamber |
Paul Deaton |
2000-04-11 |
| 6035100 |
Reflector cover for a semiconductor processing chamber |
Benjamin Bierman, David S. Ballance, James V. Tietz, Brian Haas, Paul Deaton |
2000-03-07 |
| 5960555 |
Method and apparatus for purging the back side of a substrate during chemical vapor processing |
Paul Deaton, Benjamin Bierman, Brian Haas, David S. Ballance, James V. Tietz |
1999-10-05 |
| 5635718 |
Multi-module radiation detecting device and fabrication method |
James M. DePuydt, Nang T. Tran, James C. Brown, Thomas J. Staiger, John C. Dahlquist |
1997-06-03 |
