Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6133152 | Co-rotating edge ring extension for use in a semiconductor processing chamber | Benjamin Bierman, David S. Ballance, Brian Haas, Paul Deaton, James V. Tietz | 2000-10-17 |
| 6123766 | Method and apparatus for achieving temperature uniformity of a substrate | David S. Ballance, Benjamin Bierman, Paul Deaton, Brian Haas, Nobuyuki Takahashi +1 more | 2000-09-26 |
| 6048403 | Multi-ledge substrate support for a thermal processing chamber | Paul Deaton | 2000-04-11 |
| 6035100 | Reflector cover for a semiconductor processing chamber | Benjamin Bierman, David S. Ballance, James V. Tietz, Brian Haas, Paul Deaton | 2000-03-07 |
| 5960555 | Method and apparatus for purging the back side of a substrate during chemical vapor processing | Paul Deaton, Benjamin Bierman, Brian Haas, David S. Ballance, James V. Tietz | 1999-10-05 |
| 5635718 | Multi-module radiation detecting device and fabrication method | James M. DePuydt, Nang T. Tran, James C. Brown, Thomas J. Staiger, John C. Dahlquist | 1997-06-03 |