Thermal chamber with improved thermal uniformity

Assignee

• Applied Materials

Inventors

• Dongming Iu (20 patents)
• Kartik Shah (68 patents)
• Norman L. Tam (33 patents)
• Matthew Spuller (12 patents)
• Jau-Jiun CHEN (1 patents)
• Kong CHAN (9 patents)
• Elizabeth Neville (8 patents)
• Preetham Rao (16 patents)
• Abhilash J. Mayur (81 patents)
• Gia Khanh Pham (10 patents)

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