Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326282 | Cooling flow in substrate processing according to predicted cooling parameters | Ala Moradian, Umesh M. Kelkar, Orlando Trejo, Karthik Ramanathan | 2025-06-10 |
| 12228905 | Eco-efficiency monitoring and exploration platform for semiconductor manufacturing | Ala Moradian, Umesh M. Kelkar, Orlando Trejo, Sergey Meirovich, Kartik Shah +1 more | 2025-02-18 |
| 12001197 | Eco-efficiency (sustainability) dashboard for semiconductor manufacturing | Ala Moradian, Umesh M. Kelkar, Mark Denome, Prashanth Kothnur, Karthik Ramanathan +3 more | 2024-06-04 |
| 11978646 | Thermal chamber with improved thermal uniformity | Dongming Iu, Kartik Shah, Norman L. Tam, Matthew Spuller, Jau-Jiun CHEN +4 more | 2024-05-07 |
| 11881416 | Gas delivery system for a shared gas delivery architecture | Arun Chakravarthy Chakravarthy, Chahal Neema, Abhijit A. Kangude, Vishal Suresh Jamakhandi, Kurt R. Langeland +3 more | 2024-01-23 |
| 11515129 | Radiation shield modification for improving substrate temperature uniformity | Satish Radhakrishnan, Kartik Shah, Vinay Prabhakar, Venkata Sharat Chandra Parimi, Sungwon Ha | 2022-11-29 |