Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11881416 | Gas delivery system for a shared gas delivery architecture | Arun Chakravarthy Chakravarthy, Chahal Neema, Abhijit A. Kangude, Elizabeth Neville, Kurt R. Langeland +3 more | 2024-01-23 |
| 11714430 | Process fluid path switching in recipe operations | Mitesh Sanghvi, Venkatanarayana Shankaramurthy, Peter Standish, Anton Baryshnikov, Thorsten Kril +2 more | 2023-08-01 |
| 11487304 | Process fluid path switching in recipe operations | Mitesh Sanghvi, Venkatanarayana Shankaramurthy, Peter Standish, Anton Baryshnikov, Thorsten Kril +2 more | 2022-11-01 |