Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12265379 | Methods and mechanisms for adjusting film deposition parameters during substrate manufacturing | Venkatanarayana Shankarmurthy, Yulian Yao, Chuan Ying Wang, Xinhai Han | 2025-04-01 |
| 11841692 | Variable loop control feature | Venkatanarayana Shankaramurthy, Anton Baryshnikov, Brett Berens, Shuang Liu | 2023-12-12 |
| 11714430 | Process fluid path switching in recipe operations | Venkatanarayana Shankaramurthy, Peter Standish, Anton Baryshnikov, Thorsten Kril, Chahal Neema +2 more | 2023-08-01 |
| 11487304 | Process fluid path switching in recipe operations | Venkatanarayana Shankaramurthy, Peter Standish, Anton Baryshnikov, Thorsten Kril, Chahal Neema +2 more | 2022-11-01 |
| 11449026 | Variable loop control feature | Venkatanarayana Shankaramurthy, Anton Baryshnikov, Brett Berens, Shuang Liu | 2022-09-20 |