Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062567 | Systems and methods for substrate support temperature control | Zubin Huang, Rui Cheng, Diwakar Kedlaya, Satish Radhakrishnan, Anton Baryshnikov +3 more | 2024-08-13 |
| 11841692 | Variable loop control feature | Anton Baryshnikov, Brett Berens, Mitesh Sanghvi, Shuang Liu | 2023-12-12 |
| 11714430 | Process fluid path switching in recipe operations | Mitesh Sanghvi, Peter Standish, Anton Baryshnikov, Thorsten Kril, Chahal Neema +2 more | 2023-08-01 |
| 11532525 | Controlling concentration profiles for deposited films using machine learning | Anton Baryshnikov, Aykut Aydin, Zubin Huang, Rui Cheng, Yi Yang +3 more | 2022-12-20 |
| 11487304 | Process fluid path switching in recipe operations | Mitesh Sanghvi, Peter Standish, Anton Baryshnikov, Thorsten Kril, Chahal Neema +2 more | 2022-11-01 |
| 11449026 | Variable loop control feature | Anton Baryshnikov, Brett Berens, Mitesh Sanghvi, Shuang Liu | 2022-09-20 |
| 11031262 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2021-06-08 |
| 10636684 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2020-04-28 |
| 10403515 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2019-09-03 |