Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12205818 | Boron concentration tunability in boron-silicon films | Yi Yang, Krishna Nittala, Rui Cheng, Karthik Janakiraman, Diwakar Kedlaya +1 more | 2025-01-21 |
| 12142480 | Seam removal in high aspect ratio gap-fill | Qinghua Zhao, Rui Cheng, Ruiyun Huang, Dong-Hyung LEE, Karthik Janakiraman | 2024-11-12 |
| 12077852 | Metal-doped boron films | Rui Cheng, Karthik Janakiraman | 2024-09-03 |
| 12033848 | Processes for depositing sib films | Rui Cheng, Karthik Janakiraman, Abhijit Basu Mallick, Takehito Koshizawa, Bo Qi | 2024-07-09 |
| 11961739 | Boron concentration tunability in boron-silicon films | Yi Yang, Krishna Nittala, Rui Cheng, Karthik Janakiraman, Diwakar Kedlaya +1 more | 2024-04-16 |
| 11939674 | Methods to reduce material surface roughness | Yi Yang, Krishna Nittala, Karthik Janakiraman, Diwakar Kedlaya | 2024-03-26 |
| 11827514 | Amorphous silicon-based films resistant to crystallization | Krishna Nittala, Karthik Janakiraman, Yi Yang, Gautam K. Hemani | 2023-11-28 |
| 11676813 | Doping semiconductor films | Rui Cheng, Yi Yang, Krishna Nittala, Karthik Janakiraman, Bo Qi +1 more | 2023-06-13 |
| 11640905 | Plasma enhanced deposition of silicon-containing films at low temperature | Rui Cheng, Karthik Janakiraman | 2023-05-02 |
| 11618949 | Methods to reduce material surface roughness | Yi Yang, Krishna Nittala, Karthik Janakiraman, Diwakar Kedlaya | 2023-04-04 |
| 11532525 | Controlling concentration profiles for deposited films using machine learning | Anton Baryshnikov, Zubin Huang, Rui Cheng, Yi Yang, Diwakar Kedlaya +3 more | 2022-12-20 |