Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142480 | Seam removal in high aspect ratio gap-fill | Qinghua Zhao, Rui Cheng, Dong-Hyung LEE, Aykut Aydin, Karthik Janakiraman | 2024-11-12 |
| 11699577 | Treatment for high-temperature cleans | Sarah Michelle Bobek, Abdul Aziz Khaja, Amit Kumar BANSAL, Dong-Hyung LEE, Ganesh Balasubramanian +6 more | 2023-07-11 |