Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11892821 | Communication node to interface between evaluation systems and a manufacturing system | Michael David Howells, Hemanth Konanur Nagendra, Jatinder Sasan | 2024-02-06 |
| 11714430 | Process fluid path switching in recipe operations | Mitesh Sanghvi, Venkatanarayana Shankaramurthy, Peter Standish, Anton Baryshnikov, Chahal Neema +2 more | 2023-08-01 |
| 11487304 | Process fluid path switching in recipe operations | Mitesh Sanghvi, Venkatanarayana Shankaramurthy, Peter Standish, Anton Baryshnikov, Chahal Neema +2 more | 2022-11-01 |
| 10409272 | Method and apparatus to automatically create virtual sensors with templates | Natalia Kroupnova, Aleksey Yanovich, Mikhail B. Kozine | 2019-09-10 |
| 9910430 | K-nearest neighbor-based method and system to provide multi-variate analysis on tool process data | Dermot Cantwell, Aleksey Yanovich | 2018-03-06 |
| 8812261 | Method and apparatus to automatically create virtual sensors with templates | Natalia Kroupnova, Aleksey Yanovich, Mikhail B. Kozine | 2014-08-19 |
| 8572155 | Virtual sensors | Aleksey Yanovich, Natalia Kroupnova | 2013-10-29 |
| 8473247 | Methods for monitoring processing equipment | James P. Cruse, Dermot Cantwell, Michael R. Rice, Charles Hardy | 2013-06-25 |