| 12205845 |
Semiconductor processing chamber to accommodate parasitic plasma formation |
Khokan Chandra Paul, Tsutomu Tanaka, Adam J. Fischbach, Juan Carlos Rocha-Alvarez |
2025-01-21 |
| 12198925 |
Systems and methods for depositing low-k dielectric films |
Shaunak Mukherjee, Kang Sub Yim, Deenesh Padhi, Rahul Rajeev, Shubham Chowdhuri |
2025-01-14 |
| 12057325 |
Gasbox for semiconductor processing chamber |
Rahul Rajeev, Yunzhe Yang, Kedar Joshi |
2024-08-06 |
| 11881416 |
Gas delivery system for a shared gas delivery architecture |
Arun Chakravarthy Chakravarthy, Chahal Neema, Elizabeth Neville, Vishal Suresh Jamakhandi, Kurt R. Langeland +3 more |
2024-01-23 |
| 11714430 |
Process fluid path switching in recipe operations |
Mitesh Sanghvi, Venkatanarayana Shankaramurthy, Peter Standish, Anton Baryshnikov, Thorsten Kril +2 more |
2023-08-01 |
| 11694908 |
Gasbox for semiconductor processing chamber |
Rahul Rajeev, Yunzhe Yang, Kedar Joshi |
2023-07-04 |
| 11594409 |
Systems and methods for depositing low-k dielectric films |
Shaunak Mukherjee, Kang Sub Yim, Deenesh Padhi, Rahul Rajeev, Shubham Chowdhuri |
2023-02-28 |
| 11487304 |
Process fluid path switching in recipe operations |
Mitesh Sanghvi, Venkatanarayana Shankaramurthy, Peter Standish, Anton Baryshnikov, Thorsten Kril +2 more |
2022-11-01 |
| 11326256 |
Dome stress isolating layer |
Luke Bonecutter, Yunzhe Yang, Rupankar Choudhury |
2022-05-10 |
| 11227746 |
Isolated backside helium delivery system |
Luke Bonecutter |
2022-01-18 |
| 10300557 |
Hybrid substrate processing |
Nathan K. Gupta, Simon R. Lancaster-Larocque, Prithu Sharma, Weibo Cheng, Bryan W. Posner +2 more |
2019-05-28 |
| 9506145 |
Method and hardware for cleaning UV chambers |
Sanjeev Baluja, Alexandros T. Demos, Kelvin Chan, Juan Carlos Rocha-Alvarez, Scott A. Hendrickson +6 more |
2016-11-29 |
| 9364871 |
Method and hardware for cleaning UV chambers |
Sanjeev Baluja, Alexandros T. Demos, Kelvin Chan, Juan Carlos Rocha-Alvarez, Scott A. Hendrickson +6 more |
2016-06-14 |
| 8309421 |
Dual-bulb lamphead control methodology |
Yao-Hung YANG, Sanjeev Baluja, Michael A. Martinelli, Liliya Krivulina, Thomas Nowak +2 more |
2012-11-13 |
