Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198925 | Systems and methods for depositing low-k dielectric films | Shaunak Mukherjee, Kang Sub Yim, Deenesh Padhi, Abhijit A. Kangude, Shubham Chowdhuri | 2025-01-14 |
| 12057325 | Gasbox for semiconductor processing chamber | Yunzhe Yang, Abhijit A. Kangude, Kedar Joshi | 2024-08-06 |
| 11694908 | Gasbox for semiconductor processing chamber | Yunzhe Yang, Abhijit A. Kangude, Kedar Joshi | 2023-07-04 |
| 11594409 | Systems and methods for depositing low-k dielectric films | Shaunak Mukherjee, Kang Sub Yim, Deenesh Padhi, Abhijit A. Kangude, Shubham Chowdhuri | 2023-02-28 |