Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862475 | Gas mixer to enable RPS purging | Fang Ruan, Diwakar Kedlaya, Amit Kumar BANSAL, Venkata Sharat Chandra Parimi, Rajaram Narayanan +3 more | 2024-01-02 |
| 11610800 | Capacitive method of detecting wafer chucking and de-chucking | Job George Konnoth Joseph, Syam Sundeep Boosa, Gopu Krishna | 2023-03-21 |
| 11326256 | Dome stress isolating layer | Luke Bonecutter, Yunzhe Yang, Abhijit A. Kangude | 2022-05-10 |
| 10858735 | Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods | Danny D. WANG, Jason Michael Lamb, Jun Tae Choi, Zhong Qiang Hua, Juan Carlos Rocha-Alvarez | 2020-12-08 |
| 10510567 | Integrated substrate temperature measurement on high temperature ceramic heater | Yizhen Zhang, Jay D. Pinson, II, Jason M. Schaller, Hanish Kumar Panavalappil Kumarankutty | 2019-12-17 |
| 10435786 | Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods | Danny D. WANG, Jun Tae Choi, Zhong Qiang Hua, Juan Carlos Rocha-Alvarez, Jason Michael Lamb | 2019-10-08 |
| 10388549 | On-board metrology (OBM) design and implication in process tool | Khokan Chandra Paul, Jay D. Pinson, II, Juan Carlos Rocha-Alvarez, Hari Ponnekanti, Shekhar ATHANI +2 more | 2019-08-20 |