Issued Patents All Time
Showing 25 most recent of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431329 | Method of assembling drift tube assemblies in ion implantors | Aaron P. Webb, Krag R. Senior, Chris Czajka, Charles T. Carlson | 2025-09-30 |
| 12374521 | Volume filling cassette for load lock | Michael Mason Carrell, Victor Flores Iracheta | 2025-07-29 |
| 12315747 | Workpiece handling architecture for high workpiece throughput | Michael Mason Carrell, William T. Weaver, Charles T. Carlson | 2025-05-27 |
| 12315748 | Workpiece handling architecture for high workpiece throughput | Michael Mason Carrell, William T. Weaver, Charles T. Carlson | 2025-05-27 |
| 12170220 | Robot for simultaneous substrate transfer | Luke Bonecutter, Charles T. Carlson, Rajkumar Thanu, Karuppasamy Muthukamatchi, Jeff Hudgens +1 more | 2024-12-17 |
| 12074042 | High-density substrate processing systems and methods | Steve Hongkham, Charles T. Carlson, Tuan Nguyen, Swaminathan Srinivasan, Khokan Chandra Paul | 2024-08-27 |
| 11948817 | Robot for simultaneous substrate transfer | Charles T. Carlson, Luke Bonecutter, David Blahnik | 2024-04-02 |
| 11742235 | Coaxial lift device with dynamic leveling | Jeffrey Blahnik, Amit Kumar BANSAL | 2023-08-29 |
| 11590662 | Robot for simultaneous substrate transfer | Paul Z. Wirth, Charles T. Carlson | 2023-02-28 |
| 11574826 | High-density substrate processing systems and methods | Steve Hongkham, Charles T. Carlson, Tuan Nguyen, Swaminathan Srinivasan, Khokan Chandra Paul | 2023-02-07 |
| 11499666 | Precision dynamic leveling mechanism with long motion capability | Michael Paul Rohrer, Tuan Nguyen | 2022-11-15 |
| 11476135 | Robot for simultaneous substrate transfer | Charles T. Carlson, Luke Bonecutter, David Blahnik | 2022-10-18 |
| 11443973 | Robot for simultaneous substrate transfer | Luke Bonecutter, Charles T. Carlson, Rajkumar Thanu, Karuppasamy Muthukamatchi, Jeff Hudgens +1 more | 2022-09-13 |
| 11434569 | Ground path systems for providing a shorter and symmetrical ground path | Tuan Nguyen, Edward P. Hammond, IV, David Blahnik, Tejas Ulavi, Amit Kumar BANSAL +3 more | 2022-09-06 |
| 11355367 | Robot for simultaneous substrate transfer | Charles T. Carlson, Luke Bonecutter, David Blahnik, Karuppasamy Muthukamatchi, Jeff Hudgens +1 more | 2022-06-07 |
| 11315806 | Batch heating and cooling chamber or loadlock | Robert Brent Vopat, Paul E. Pergande, Benjamin B. Riordon, David Blahnik, William T. Weaver | 2022-04-26 |
| 11264258 | Buffer chamber wafer heating mechanism and supporting robots | William T. Weaver, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon, Paul E. Pergande | 2022-03-01 |
| D938373 | Substrate transfer structure | Benjamin B. Riordon, Mitchell DiSanto, Paul Forderhase, Gary Wyka, Jeffrey C. Hudgens +7 more | 2021-12-14 |
| 11117265 | Robot for simultaneous substrate transfer | Paul Z. Wirth, Charles T. Carlson | 2021-09-14 |
| 11049761 | Shutter disk for physical vapor deposition chamber | Karl M. Brown | 2021-06-29 |
| 10984990 | Electrode assembly | Ramesh Bokka, Jay D. Pinson, II, Luke Bonecutter | 2021-04-20 |
| 10854491 | Dynamic leveling process heater lift | Michael Paul Rohrer, Tuan Nguyen, William T. Weaver, Gregory John Freeman, Robert Brent Vopat | 2020-12-01 |
| 10854483 | High pressure steam anneal processing apparatus | Robert Brent Vopat, Charles T. Carlson, Jeffrey Blahnik, Timothy Joseph Franklin, David Blahnik +1 more | 2020-12-01 |
| 10739208 | Semiconductor workpiece temperature measurement system | Klaus Petry, Ala Moradian, Morgan Evans | 2020-08-11 |
| 10699930 | Buffer chamber wafer heating mechanism and supporting robots | William T. Weaver, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon, Paul E. Pergande | 2020-06-30 |