Issued Patents All Time
Showing 26–50 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10597779 | Susceptor position and rational apparatus and methods of use | William T. Weaver, Robert Brent Vopat, Joseph Yudovsky | 2020-03-24 |
| 10586720 | Wafer processing systems including multi-position batch load lock apparatus with temperature control capability | William T. Weaver, Joseph Yudovsky, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2020-03-10 |
| 10510567 | Integrated substrate temperature measurement on high temperature ceramic heater | Yizhen Zhang, Rupankar Choudhury, Jay D. Pinson, II, Hanish Kumar Panavalappil Kumarankutty | 2019-12-17 |
| 10468292 | Shutter disk for physical vapor deposition chamber | Karl M. Brown | 2019-11-05 |
| 10443934 | Substrate handling and heating system | Morgan Evans, D. Jeffrey Lischer, Ala Moradian, William T. Weaver, Robert Brent Vopat | 2019-10-15 |
| 10427303 | Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing | William T. Weaver, Malcolm N. Daniel, JR., Robert Brent Vopat, Jacob Newman, Dinesh Kanawade +4 more | 2019-10-01 |
| 10283379 | Batch LED heating and cooling chamber or loadlock | Robert Brent Vopat, Paul E. Pergande, Benjamin B. Riordon, David Blahnik, William T. Weaver | 2019-05-07 |
| 10256125 | Wafer processing systems including multi-position batch load lock apparatus with temperature control capability | William T. Weaver, Joseph Yudovsky, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2019-04-09 |
| 10249525 | Dynamic leveling process heater lift | Michael Paul Rohrer, Tuan Nguyen, William T. Weaver, Gregory John Freeman, Robert Brent Vopat | 2019-04-02 |
| 10103046 | Buffer chamber wafer heating mechanism and supporting robot | William T. Weaver, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon, Paul E. Pergande | 2018-10-16 |
| 9933314 | Semiconductor workpiece temperature measurement system | Klaus Petry, Ala Moradian, Morgan Evans | 2018-04-03 |
| 9899242 | Device and method for substrate heating during transport | Morgan Evans, Ala Moradian, Robert Brent Vopat, David Blahnik, William T. Weaver | 2018-02-20 |
| 9728430 | Electrostatic chuck with LED heating | William T. Weaver, Morgan Evans, Robert Brent Vopat, Paul E. Pergande, Julian G. Blake +2 more | 2017-08-08 |
| 9694989 | Workpiece handling system and methods of workpiece handling | Robert Brent Vopat, Charles T. Carlson, Malcolm N. Daniel, JR., Aaron P. Webb, William T. Weaver | 2017-07-04 |
| 9696097 | Multi-substrate thermal management apparatus | Kallol Bera, Kim Vellore, Andrew J. Constant, Jacob Newman, Jeffrey Blahnik +3 more | 2017-07-04 |
| 9685303 | Apparatus for heating and processing a substrate | Morgan Evans, D. Jeffrey Lischer, Ala Moradian | 2017-06-20 |
| 9669552 | System and method for quick-swap of multiple substrates | Robert Brent Vopat, William T. Weaver | 2017-06-06 |
| 9633886 | Hybrid thermal electrostatic clamp | Morgan Evans, Ala Moradian, D. Jeffrey Lischer, Gregory Thronson | 2017-04-25 |
| 9496117 | Two-dimensional mass resolving slit mechanism for semiconductor processing systems | Robert Brent Vopat | 2016-11-15 |
| 9378994 | Multi-position batch load lock apparatus and systems and methods including same | William T. Weaver, Joseph Yudovsky, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2016-06-28 |
| 9287148 | Dynamic heating method and system for wafer processing | Morgan Evans, Kevin Anglin, D. Jeffrey Lischer, William T. Weaver, Robert Brent Vopat | 2016-03-15 |
| 9281222 | Wafer handling systems and methods | William T. Weaver, Malcolm N. Daniel, JR., Robert Brent Vopat, Jacob Newman, Dinesh Kanawade +4 more | 2016-03-08 |
| 9214369 | Dynamic pitch substrate lift | Robert Brent Vopat, Jeffrey Blahnik, Malcolm N. Daniel, JR. | 2015-12-15 |
| 9202734 | Electrostatic charge removal for solar cell grippers | Robert Brent Vopat | 2015-12-01 |
| 9145271 | Optimization of conveyor belts used for workpiece processing | Robert Brent Vopat, Malcolm N. Daniel, JR., Luke Bonecutter, Charles T. Carlson, William T. Weaver | 2015-09-29 |