Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431329 | Method of assembling drift tube assemblies in ion implantors | Krag R. Senior, Chris Czajka, Charles T. Carlson, Jason M. Schaller | 2025-09-30 |
| 11856685 | Stiffened RF LINAC coil inductor with internal support structure | Charles T. Carlson, Paul J. Murphy, Frank Sinclair, David Blahnik | 2023-12-26 |
| 11306824 | Dual port remote plasma clean isolation valve | Benjamin B. Riordon, Charles T. Carlson, Gary Wyka | 2022-04-19 |
| 10969029 | Low particle protected flapper valve | Charles T. Carlson, Tammy Jo Pride, Benjamin B. Riordon | 2021-04-06 |
| 10854483 | High pressure steam anneal processing apparatus | Jason M. Schaller, Robert Brent Vopat, Charles T. Carlson, Jeffrey Blahnik, Timothy Joseph Franklin +1 more | 2020-12-01 |
| 10446710 | Transfer chamber and method of using a transfer chamber | Charles T. Carlson, Paul Forderhase, William T. Weaver, Robert Brent Vopat | 2019-10-15 |
| 10217657 | Active substrate alignment system and method | Timothy J. Miller, Tammy Jo Pride, Christopher N. Grant, James D. Strassner, Charles T. Carlson | 2019-02-26 |
| 9995631 | System and method to monitor semiconductor workpiece temperature using thermal imaging | Paul E. Pergande, Gary Wyka | 2018-06-12 |
| 9694989 | Workpiece handling system and methods of workpiece handling | Jason M. Schaller, Robert Brent Vopat, Charles T. Carlson, Malcolm N. Daniel, JR., William T. Weaver | 2017-07-04 |
| 9659677 | Shielding device for substrate edge protection and method of using same | Charles T. Carlson, William T. Weaver, Timothy J. Miller, James D. Strassner | 2017-05-23 |
| 9570309 | Mask alignment system for semiconductor processing | Charles T. Carlson, William T. Weaver, Christopher N. Grant | 2017-02-14 |
| 9490153 | Mechanical alignment of substrates to a mask | Charles T. Carlson, Michael Honan, Luigi G. Amato, Christopher N. Grant, James D. Strassner | 2016-11-08 |
| 9333733 | Multi-part mask for implanting workpieces | Charles T. Carlson | 2016-05-10 |
| 9091491 | Cooling plates and semiconductor apparatus thereof | Helder Lee, Miriam Schwartz, Michael Kuchar, Theodoss Costuros | 2015-07-28 |
| 9082799 | System and method for 2D workpiece alignment | William T. Weaver, Charles T. Carlson, Scott Alan Smith, Michael Beck, James D. Strassner +2 more | 2015-07-14 |
| 8698104 | System and method for handling multiple workpieces for matrix configuration processing | William T. Weaver, Jaime A. Carrera, Robert Brent Vopat, Charles T. Carlson | 2014-04-15 |
| 7833351 | Batch processing platform for ALD and CVD | Adam Brailove, Joseph Yudovsky, Nir Merry, Andrew J. Constant, Efrain Quiles +3 more | 2010-11-16 |