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Processing chamber with annealing mini-environment |
Michael Honan, David Blahnik, Robert Brent Vopat, Charles T. Carlson |
2025-03-11 |
| 11791176 |
Processing chamber with annealing mini-environment |
Michael Honan, David Blahnik, Robert Brent Vopat, Charles T. Carlson |
2023-10-17 |
| 11742235 |
Coaxial lift device with dynamic leveling |
Jason M. Schaller, Amit Kumar BANSAL |
2023-08-29 |
| 10854483 |
High pressure steam anneal processing apparatus |
Jason M. Schaller, Robert Brent Vopat, Charles T. Carlson, Timothy Joseph Franklin, David Blahnik +1 more |
2020-12-01 |
| 10831112 |
Reticle processing system |
James D. Strassner, Charles T. Carlson, Robert Brent Vopat |
2020-11-10 |
| 10586720 |
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability |
William T. Weaver, Joseph Yudovsky, Jason M. Schaller, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more |
2020-03-10 |
| 10256125 |
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability |
William T. Weaver, Joseph Yudovsky, Jason M. Schaller, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more |
2019-04-09 |
| 10256132 |
Reticle processing system |
James D. Strassner, Charles T. Carlson, Robert Brent Vopat |
2019-04-09 |
| 10186449 |
Apparatus and methods for wafer rotation to improve spatial ALD process uniformity |
William T. Weaver, Joseph Yudovsky |
2019-01-22 |
| 9696097 |
Multi-substrate thermal management apparatus |
Kallol Bera, Kim Vellore, Andrew J. Constant, Jacob Newman, Jason M. Schaller +3 more |
2017-07-04 |
| 9484183 |
Linkage conduit for vacuum chamber applications |
Eric D. Hermanson, Robert J. Mitchell, Steven M. Anella, William T. Weaver, Michael Paul Rohrer +1 more |
2016-11-01 |
| 9378994 |
Multi-position batch load lock apparatus and systems and methods including same |
William T. Weaver, Joseph Yudovsky, Jason M. Schaller, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more |
2016-06-28 |
| 9214369 |
Dynamic pitch substrate lift |
Robert Brent Vopat, Jason M. Schaller, Malcolm N. Daniel, JR. |
2015-12-15 |
| 9016998 |
High throughput, low volume clamshell load lock |
Robert Brent Vopat, William T. Weaver |
2015-04-28 |
| 8497486 |
Ion source having a shutter assembly |
William T. Weaver |
2013-07-30 |
| 5294069 |
Media feed and roller device for an electrographic printer |
— |
1994-03-15 |
