Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249522 | Processing chamber with annealing mini-environment | Michael Honan, David Blahnik, Robert Brent Vopat, Charles T. Carlson | 2025-03-11 |
| 11791176 | Processing chamber with annealing mini-environment | Michael Honan, David Blahnik, Robert Brent Vopat, Charles T. Carlson | 2023-10-17 |
| 11742235 | Coaxial lift device with dynamic leveling | Jason M. Schaller, Amit Kumar BANSAL | 2023-08-29 |
| 10854483 | High pressure steam anneal processing apparatus | Jason M. Schaller, Robert Brent Vopat, Charles T. Carlson, Timothy Joseph Franklin, David Blahnik +1 more | 2020-12-01 |
| 10831112 | Reticle processing system | James D. Strassner, Charles T. Carlson, Robert Brent Vopat | 2020-11-10 |
| 10586720 | Wafer processing systems including multi-position batch load lock apparatus with temperature control capability | William T. Weaver, Joseph Yudovsky, Jason M. Schaller, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2020-03-10 |
| 10256125 | Wafer processing systems including multi-position batch load lock apparatus with temperature control capability | William T. Weaver, Joseph Yudovsky, Jason M. Schaller, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2019-04-09 |
| 10256132 | Reticle processing system | James D. Strassner, Charles T. Carlson, Robert Brent Vopat | 2019-04-09 |
| 10186449 | Apparatus and methods for wafer rotation to improve spatial ALD process uniformity | William T. Weaver, Joseph Yudovsky | 2019-01-22 |
| 9696097 | Multi-substrate thermal management apparatus | Kallol Bera, Kim Vellore, Andrew J. Constant, Jacob Newman, Jason M. Schaller +3 more | 2017-07-04 |
| 9484183 | Linkage conduit for vacuum chamber applications | Eric D. Hermanson, Robert J. Mitchell, Steven M. Anella, William T. Weaver, Michael Paul Rohrer +1 more | 2016-11-01 |
| 9378994 | Multi-position batch load lock apparatus and systems and methods including same | William T. Weaver, Joseph Yudovsky, Jason M. Schaller, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2016-06-28 |
| 9214369 | Dynamic pitch substrate lift | Robert Brent Vopat, Jason M. Schaller, Malcolm N. Daniel, JR. | 2015-12-15 |
| 9016998 | High throughput, low volume clamshell load lock | Robert Brent Vopat, William T. Weaver | 2015-04-28 |
| 8497486 | Ion source having a shutter assembly | William T. Weaver | 2013-07-30 |
| 5294069 | Media feed and roller device for an electrographic printer | — | 1994-03-15 |