Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10704693 | Cryogenic ferrofluid sealed rotary union | Roger B. Fish, Shardul S. Patel | 2020-07-07 |
| 10157763 | High throughput substrate handling endstation and sequence | Eric D. Hermanson, Benjamin B. Riordon | 2018-12-18 |
| 10152033 | Proportional integral derivative control incorporating multiple actuators | Jack J. LoPiccolo | 2018-12-11 |
| 9891599 | Proportional integral derivative control incorporating multiple actuators | Jack J. LoPiccolo | 2018-02-13 |
| 9484183 | Linkage conduit for vacuum chamber applications | Eric D. Hermanson, Steven M. Anella, Jeffrey Blahnik, William T. Weaver, Michael Paul Rohrer +1 more | 2016-11-01 |
| 9415508 | Multi-link substrate scanning device | William T. Weaver | 2016-08-16 |
| 8939451 | Floating high vacuum seal cartridge | Elaina Babayan | 2015-01-27 |
| 8698108 | Ion beam measurement system and method | Joseph P. Dzengeleski, Eric D. Hermanson, Tyler Rockwell, James W. Wilkinson, James P. Buonodono +1 more | 2014-04-15 |
| 8216923 | Integrated shadow mask/carrier for patterned ion implantation | Nicholas P. T. Bateman, Kevin M. Daniels, Atul Gupta, Russell J. Low, Benjamin B. Riordon +1 more | 2012-07-10 |
| 8020398 | Fluid delivery mechanism for vacuum wafer processing system | Roger B. Fish | 2011-09-20 |
| 7816153 | Method and apparatus for producing a dislocation-free crystalline sheet | Peter L. Kellerman, Frank Sinclair, Frederick M. Carlson, Nicholas P. T. Bateman | 2010-10-19 |