Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12232299 | Methods and apparatus for cooling a substrate support | Robert Irwin Decottignies, Steven Szudarski, Shane Lawrence Kintner | 2025-02-18 |
| 12181054 | Linear actuated 3 way spool valve with constant total flow | — | 2024-12-31 |
| 11631588 | Method and apparatus for non line-of-sight doping | Christopher R. Hatem, Piero Sferlazzo, Dale K. Stone | 2023-04-18 |
| 10704693 | Cryogenic ferrofluid sealed rotary union | Robert J. Mitchell, Shardul S. Patel | 2020-07-07 |
| 10541137 | Method and apparatus for non line-of-sight doping | Christopher R. Hatem, Piero Sferlazzo, Dale K. Stone | 2020-01-21 |
| 10032601 | Platen support structure | Steven M. Anella, Todd Lewis MacEachern | 2018-07-24 |
| 9530682 | System and apparatus for holding a substrate over wide temperature range | W. Davis Lee | 2016-12-27 |
| 9514916 | Wafer platen thermosyphon cooling system | Gregory Citver | 2016-12-06 |
| 9417138 | Gas coupled probe for substrate temperature measurement | Jeffrey E. Krampert | 2016-08-16 |
| 9391450 | Technique for limiting transmission of fault current | Kasegn D. Takletsadik, Paul J. Murphy | 2016-07-12 |
| 9338829 | Heated platen with improved temperature uniformity | Steven M. Anella | 2016-05-10 |
| 9212949 | Technique for temperature measurement and calibration of semiconductor workpieces using infrared | Jeffrey E. Krampert | 2015-12-15 |
| 9163772 | Vacuum insulated cryogenic fluid transfer hose | Michael Santorella | 2015-10-20 |
| 9108322 | Force sensing system for substrate lifting apparatus | Richard V. Chisholm, Scott E. Peitzsch, Michael Esposito, Robert A. Poitras, Steven M. Anella +2 more | 2015-08-18 |
| 8998269 | Vacuum insulated fitting enclosure | Michael Santorella | 2015-04-07 |
| 8804288 | Technique for limiting transmission of fault current | Kasegn D. Tekletsadik, Paul J. Murphy | 2014-08-12 |
| 8467158 | Technique for limiting transmission of fault current | Kasegn D. Tekletsadik, Paul J. Murphy | 2013-06-18 |
| 8328494 | In vacuum optical wafer heater for cryogenic processing | Jeffrey E. Krampert | 2012-12-11 |
| 8320088 | Power transfer mechanism for use in transmission and distribution level electrical power systems | — | 2012-11-27 |
| 8149256 | Techniques for changing temperature of a platen | Samuel M. Barsky, Scott C. Holden, Arthur P. Riaf, Steven M. Anella | 2012-04-03 |
| 8020398 | Fluid delivery mechanism for vacuum wafer processing system | Robert J. Mitchell | 2011-09-20 |
| 7977652 | Optical heater for cryogenic ion implanter surface regeneration | Jeffrey E. Krampert | 2011-07-12 |
| 6734439 | Wafer pedestal tilt mechanism and cooling system | Allan D. Weed | 2004-05-11 |
| 6429139 | Serial wafer handling mechanism | Kevin T. Ryan, Peter L. Kellerman, Frank Sinclair, Ernest E. Allen | 2002-08-06 |
| 6347919 | Wafer processing chamber having separable upper and lower halves | Kevin T. Ryan, Peter L. Kellerman, Frank Sinclair, Ernest E. Allen | 2002-02-19 |