Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9108322 | Force sensing system for substrate lifting apparatus | Richard V. Chisholm, Scott E. Peitzsch, Michael Esposito, Steven M. Anella, Daniel A. Hall +2 more | 2015-08-18 |
| 6690022 | Ion beam incidence angle and beam divergence monitor | Grant Kenji Larsen, Ashwin Purohit, Morgan Evans, Damian Brennan | 2004-02-10 |