Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12423314 | Indicator interpretation and remote monitoring network | Andrew Heaney | 2025-09-23 |
| 6911660 | Method of measuring ion beam angles | — | 2005-06-28 |
| 6839217 | Surface structure and method of making, and electrostatic wafer clamp incorporating surface structure | — | 2005-01-04 |
| 6748293 | Methods and apparatus for high speed object handling | — | 2004-06-08 |
| 6690022 | Ion beam incidence angle and beam divergence monitor | Ashwin Purohit, Robert A. Poitras, Morgan Evans, Damian Brennan | 2004-02-10 |
| 6538873 | Active electrostatic seal and electrostatic vacuum pump | — | 2003-03-25 |
| 6362946 | Electrostatic wafer clamp having electrostatic seal for retaining gas | — | 2002-03-26 |
| 5969934 | Electrostatic wafer clamp having low particulate contamination of wafers | — | 1999-10-19 |