Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670532 | System and method for controlling electrostatic clamping of multiple platens on a spinning disk | Robert J. Mitchell | 2023-06-06 |
| 10879038 | Conductive beam optic containing internal heating element | — | 2020-12-29 |
| 10732615 | System and method for minimizing backside workpiece damage | — | 2020-08-04 |
| 9417280 | System and method for analyzing voltage breakdown in electrostatic chucks | David E. Suuronen | 2016-08-16 |
| 9108322 | Force sensing system for substrate lifting apparatus | Richard V. Chisholm, Michael Esposito, Robert A. Poitras, Steven M. Anella, Daniel A. Hall +2 more | 2015-08-18 |
| 8004817 | Method of platen fabrication to allow electrode pattern and gas cooling optimization | — | 2011-08-23 |
| 7583491 | Electrostatic chuck to limit particle deposits thereon | — | 2009-09-01 |