Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12232299 | Methods and apparatus for cooling a substrate support | Robert Irwin Decottignies, Roger B. Fish, Steven Szudarski | 2025-02-18 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12232299 | Methods and apparatus for cooling a substrate support | Robert Irwin Decottignies, Roger B. Fish, Steven Szudarski | 2025-02-18 |