Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106943 | Substrate halo arrangement for improved process uniformity | Jay Wallace, Simon Ruffell, Kevin Anglin, Tyler Rockwell, Christopher Campbell +2 more | 2024-10-01 |
| 11948781 | Apparatus and system including high angle extraction optics | Christopher Campbell, Costel Biloiu, Peter F. Kurunczi, Jay Wallace, Kevin M. Daniels +3 more | 2024-04-02 |
| 10925146 | Ion source chamber with embedded heater | Todd Lewis MacEachern, Jeffrey E. Krampert, Joseph P. Dzengeleski | 2021-02-16 |
| 6794664 | Umbilical cord facilities connection for an ion beam implanter | Robert J. Mitchell | 2004-09-21 |
| 6429139 | Serial wafer handling mechanism | Peter L. Kellerman, Frank Sinclair, Ernest E. Allen, Roger B. Fish | 2002-08-06 |
| 6347919 | Wafer processing chamber having separable upper and lower halves | Peter L. Kellerman, Frank Sinclair, Ernest E. Allen, Roger B. Fish | 2002-02-19 |
| 6305316 | Integrated power oscillator RF source of plasma immersion ion implantation system | William F. DiVergilio, Peter L. Kellerman | 2001-10-23 |