Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12014898 | Active temperature control for RF window in immersed antenna source | Adam Calkins | 2024-06-18 |
| 10974276 | Hydrophobic shafts for use in process chambers | Ernest E. Allen, Jonathan D. Fischer | 2021-04-13 |
| 10925146 | Ion source chamber with embedded heater | Kevin T. Ryan, Todd Lewis MacEachern, Joseph P. Dzengeleski | 2021-02-16 |
| 10569299 | Hydrophobic shafts for use in process chambers | Ernest E. Allen, Jonathan D. Fischer | 2020-02-25 |
| 9865433 | Gas injection system for ion beam device | Jay Wallace, Ernest E. Allen, Richard J. Hertel, Alexander C. Kontos, Shurong Liang +1 more | 2018-01-09 |
| 9520264 | Method and apparatus for clamping and cooling a substrate for ion implantation | Richard J. Hertel, John Robert Fairhurst | 2016-12-13 |
| 9417138 | Gas coupled probe for substrate temperature measurement | Roger B. Fish | 2016-08-16 |
| 9218990 | Method and apparatus for holding a plurality of substrates for processing | John Robert Fairhurst, Richard J. Hertel, Edward D. MacIntosh | 2015-12-22 |
| 9212949 | Technique for temperature measurement and calibration of semiconductor workpieces using infrared | Roger B. Fish | 2015-12-15 |
| 9175710 | Contained ceramic fastener | Michael A. Schrameyer | 2015-11-03 |
| 9070730 | Method and apparatus for removing a vertically-oriented substrate from a cassette | John Robert Fairhurst, Richard J. Hertel | 2015-06-30 |
| 8585115 | Method and apparatus for lifting a horizontally-oriented substrate from a cassette | John Robert Fairhurst, Richard J. Hertel, Richard S. Muka | 2013-11-19 |
| 8550520 | Method and apparatus for manipulating a substrate | John Robert Fairhurst, Richard J. Hertel | 2013-10-08 |
| 8328494 | In vacuum optical wafer heater for cryogenic processing | Roger B. Fish | 2012-12-11 |
| 7977652 | Optical heater for cryogenic ion implanter surface regeneration | Roger B. Fish | 2011-07-12 |