Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11875967 | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination | Qin Chen, Julian G. Blake, Michael W. Osborne, Steven M. Anella | 2024-01-16 |
| 11651986 | System for isolating electrodes at cryogenic temperatures | Steven M. Anella, Manohara Kumar | 2023-05-16 |
| 11538714 | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination | Qin Chen, Julian G. Blake, Michael W. Osborne, Steven M. Anella | 2022-12-27 |
| 11315819 | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination | Qin Chen, Julian G. Blake, Michael W. Osborne, Steven M. Anella | 2022-04-26 |
| 10974276 | Hydrophobic shafts for use in process chambers | Ernest E. Allen, Jeffrey E. Krampert | 2021-04-13 |
| 10784142 | Lift pin system for wafer handling | Stacia Marcelynas, Riordan Cayabyab | 2020-09-22 |
| 10569299 | Hydrophobic shafts for use in process chambers | Ernest E. Allen, Jeffrey E. Krampert | 2020-02-25 |